Results 231 to 240 of about 18,248 (259)

Dry Etching Technologies of Optical Device and III-V Compound Semiconductors

IEICE Transactions on Electronics, 2017
exaly  

DRY ETCHING GAS AND DRY ETCHING METHOD

2015
HIROSE ZENKO, NAKAMURA SHINGO, ITANO MITSUSHI, AOYAMA HIROICHI   +3 more
openaire   +1 more source

Dry Etching

2011
openaire   +1 more source

Dry Etching

2006
openaire   +1 more source

High throughput, high quality dry etching of copper/barrier film stacks

Microelectronic Engineering, 2000
exaly  

Dry Etching

2019
openaire   +1 more source

Dry Etch

2008
openaire   +1 more source

Dry Etch

2011
openaire   +1 more source

Chemical Dry Etching

2012
Dimitrios Peroulis, Prashant R. Waghmare, Sushanta K. Mitra, Supone Manakasettharn, J. Ashley Taylor, Tom N. Krupenkin, Wenguang Zhu, Gilbert Daniel Nessim, Francelyne Marano, Rina Guadagnini, Fernando Rodrigues-Lima, Jean-Marie Dupret, Armelle Baeza-Squiban, Sonja Boland, Jeong Young Park, Seajin Oh, Marc Madou, Yoke Khin Yap, Burcu Aslan, Hee Dong Han, Gabriel Lopez-Berestein, Anil K. Sood, Michael S.-C. Lu, Hongwei Qu, Huikai Xie, Huikai Xie, Ying Zhou, Larry L. Howell, A. T. Conlisk, Leonid V. Zhigilei, Alexey N. Volkov, Avinash M. Dongare, Zheng Yin, Yubo Fan, Stephen TC Wong, Vishal V. R. Nandigana, N. R. Aluru, Weicong Li, Harry Kwok, Reinhold Wannemacher   +39 more
openaire   +1 more source

High ion density dry etching of compound semiconductors

Materials Science and Engineering B: Solid-State Materials for Advanced Technology, 1996
exaly