Results 231 to 240 of about 17,748 (263)

Dry Etching

2011
openaire   +1 more source

High ion density dry etching of compound semiconductors

Materials Science and Engineering B: Solid-State Materials for Advanced Technology, 1996
Stephen J Pearton
exaly  

Dry Etching

2019
openaire   +1 more source

Physical Dry Etching

2012
Patrick M. Winter, Gregory M. Lanza, Samuel A. Wickline, Marc Madou, Chunlei Wang, Parag B. Deotare, Marko Loncar, Yoke Khin Yap, Jérôme Rose, Mélanie Auffan, Olivier Proux, Vincent Niviere, Jean-Yves Bottero, Zhong Lin Wang, Ying Liu, R. G. Polcawich, J. S. Pulskamp, R. M. Proie, Woo-Tae Park, Sergei V. Kalinin, Brian J. Rodriguez, Andrei L. Kholkin, Gang Logan Liu, Jao Lagemaat, Lorenzo Valdevit, John W. Hutchinson, Seajin Oh, Marc Madou, Katja Tonisch, Enrica De Rosa, Joseph Fernandez-Moure, Ennio Tasciotti, Denis Gebauer, Brian E. O’Neill, King C. Li   +34 more
openaire   +1 more source

Passivation of dry-etching damage using low-energy hydrogen implants

IEEE Electron Device Letters, 1983
S Ashok
exaly  

Dry Etching

2006
openaire   +1 more source

Dry Etch

2008
openaire   +1 more source

Dry Etch

2011
openaire   +1 more source

Effects of 3D microlens transfer into fused silica substrate by CF4/O2 dry etching

Applied Surface Science, 2017
Viktoras Grigaliūnas, Dalius Jucius, Algirdas Lazauskas   +2 more
exaly  

Dry Etching for VLSI

1991
A. J. van Roosmalen, J. A. G. Baggerman, S. J. H. Brader   +2 more
openaire   +1 more source