Results 211 to 220 of about 18,248 (259)

Novel Hybrid Organic–Inorganic Spin‐on Resist for Electron‐ or Photon‐Based Nanolithography with Outstanding Resistance to Dry Etching

Advanced Materials, 2013
Massimo Tormen, Gianluca Grenci, Giovanna Brusatin   +2 more
exaly  

Dry‐etching‐assisted femtosecond laser machining

Laser and Photonics Reviews, 2017
Qi-Dai Chen, Xue-Qing Liu, Zhen-Nan Tian   +2 more
exaly  

Monocrystalline Quartz ICP Etching: Road to High-Temperature Dry Etching

Plasma Chemistry and Plasma Processing, 2019
Artem Osipov, Gleb Iankevich
exaly  

Dry-etching process.

1986
GOBRECHT, JENS, DR., ROSSINELLI, MARCO, DR.   +1 more
openaire   +2 more sources

Lithography-free glass surface modification by self-masking during dry etching

Journal of Nanophotonics, 2011
Henning Fouckhardt
exaly  

Dry etching method

1989
OKUDAIRA SADAYUKI, TSUJIMOTO KAZUNORI, TACHI SHINICHI   +2 more
openaire   +3 more sources

Highly textured multi-crystalline silicon surface obtained by dry etching multi-step process

Solar Energy Materials and Solar Cells, 2013
Mario Tucci, Luca Serenelli, M Izzi
exaly  

Effects of 3D microlens transfer into fused silica substrate by CF4/O2 dry etching

Applied Surface Science, 2017
Mindaugas Andrulevičius, Algirdas Lazauskas, Dalius Jucius   +2 more
exaly  

Dry etching method

1992
NISHIBE, TOHRU, NUNOUE, SHINYA, KUROBE, ATSUSHI   +2 more
openaire   +2 more sources

DRY ETCHING GAS COMPOSITION AND DRY ETCHING METHOD

2020
KATO KOREHITO, IKETANI YOSHIHIKO, SHIBUSAWA YUKINOBU, SHIMIZU HISASHI   +3 more
openaire   +1 more source