Results 221 to 230 of about 17,748 (263)

55‐3: Development of Low‐Temperature Metal Dry‐Etching Equipment via ECR Plasma Source

Digest of Technical Papers SID International Symposium, 2022
Mun-Pyo Hong
exaly  

Etching—Applications and Trends of Dry Etching

1988
L. M. Ephrath, G. S. Mathad
openaire   +1 more source

Playing with sizes and shapes of colloidal particles via dry etching methods

Advances in Colloid and Interface Science, 2022
Valeria Lotito, Tomaso Zambelli
exaly  

Novel Hybrid Organic–Inorganic Spin‐on Resist for Electron‐ or Photon‐Based Nanolithography with Outstanding Resistance to Dry Etching

Advanced Materials, 2013
Gioia Della Giustina, Gianluca Grenci, Massimo Tormen   +2 more
exaly  

Chemical Dry Etching

2012
Dimitrios Peroulis, Prashant R. Waghmare, Sushanta K. Mitra, Supone Manakasettharn, J. Ashley Taylor, Tom N. Krupenkin, Wenguang Zhu, Gilbert Daniel Nessim, Francelyne Marano, Rina Guadagnini, Fernando Rodrigues-Lima, Jean-Marie Dupret, Armelle Baeza-Squiban, Sonja Boland, Jeong Young Park, Seajin Oh, Marc Madou, Yoke Khin Yap, Burcu Aslan, Hee Dong Han, Gabriel Lopez-Berestein, Anil K. Sood, Michael S.-C. Lu, Hongwei Qu, Huikai Xie, Huikai Xie, Ying Zhou, Larry L. Howell, A. T. Conlisk, Leonid V. Zhigilei, Alexey N. Volkov, Avinash M. Dongare, Zheng Yin, Yubo Fan, Stephen TC Wong, Vishal V. R. Nandigana, N. R. Aluru, Weicong Li, Harry Kwok, Reinhold Wannemacher   +39 more
openaire   +1 more source

Dry Etching

2018
openaire   +1 more source

Dry‐etching‐assisted femtosecond laser machining

Laser and Photonics Reviews, 2017
Xue-Qing Liu, Qi-Dai Chen, Xian-Bin Li
exaly  

Dry Etching

2008
openaire   +1 more source

Dry etching of Ga2O3

2019
Rohit Khanna, Kristen Bevlin, Dwarakanath Geerpuram, Jiancheng Yang, F. Ren, Stephen Pearton   +5 more
openaire   +1 more source

Highly textured multi-crystalline silicon surface obtained by dry etching multi-step process

Solar Energy Materials and Solar Cells, 2013
Mario Tucci
exaly