Results 221 to 230 of about 18,248 (259)
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Dry etching method, and dry etching agent and storage container therefor
2022OOMORI HIROYUKI +2 more
openaire +2 more sources
Dry etching properties of boron carbon nitride (BCN) films using carbon fluoride gas
Diamond and Related Materials, 2008Hidemitsu Aoki, Chiharu Kimura
exaly
Passivation of dry-etching damage using low-energy hydrogen implants
IEEE Electron Device Letters, 1983S Ashok, S J Fonash
exaly
The application of secondary effects in high aspect ratio dry etching for the fabrication of MEMS
Microelectronic Engineering, 2001Ivan Kostic, I W Rangelow
exaly
Etching—Applications and Trends of Dry Etching
1988L. M. Ephrath, G. S. Mathad
openaire +1 more source
Plasma-based dry etching techniques in the silicon integrated circuit technology
IBM Journal of Research and Development, 1992Gottlieb Oehrlein
exaly