Results 241 to 250 of about 1,014,878 (298)

Dry Etching (Part 1): Particulate Contamination Due to Dry Etching

1998
For the mass production of 64 kbit DRAMs, 3 μm design-rule devices, interest in the change from wet to dry etching processes has increased greatly.
openaire   +1 more source

Dry etching method

1993
OKUHIRA, HIDEKAZU, ONO, TETSUO, HIRAOKA, SUSUMU, SUZUKI, KEIZO, SHIGETA, JUNJI, MASUDA, HIROSHI, MORI, MITSUHIRO, TANIMOTO, TAKUMA, NAKATSUKA, SHINICHI, MITANI, KATSUHIKO   +9 more
  +19 more sources

Piezoelectric aluminum nitride thin-films: A review of wet and dry etching techniques

Microelectronic Engineering, 2022
Rui M R Pinto, K K Nagaraja
exaly  

55-3: Development of Low-Temperature Metal Dry-Etching Equipment via ECR Plasma Source

Digest of Technical Papers SID International Symposium, 2022
MunPyp Hong, Sangheon Lee
exaly  

DRY ETCHING METHOD

2015
UMEZAKI TOMONORI, MORI ISAMU
openaire   +6 more sources

Novel Hybrid Organic–Inorganic Spin-on Resist for Electron- or Photon-Based Nanolithography with Outstanding Resistance to Dry Etching

Advanced Materials, 2013
Massimo Tormen, Gianluca Grenci, Giovanna Brusatin   +2 more
exaly  

Dry etching and sputtering

Philosophical Transactions Series A, Mathematical, Physical, and Engineering Sciences, 2004
C D W Wilkinson
exaly  

Dry etching and induced damage

Microelectronic Engineering, 1996
T Zijlstra, E van der Drift
exaly  

Dry-etching-assisted femtosecond laser machining

Laser and Photonics Reviews, 2017
Zhuo-Chen Ma, Qi-Dai Chen, Xue-Qing Liu
exaly  

Highly textured multi-crystalline silicon surface obtained by dry etching multi-step process

Solar Energy Materials and Solar Cells, 2013
Mario Tucci, Luca Serenelli, M Izzi
exaly