Results 241 to 250 of about 17,748 (263)

Plasma-based dry etching techniques in the silicon integrated circuit technology

IBM Journal of Research and Development, 1992
Gottlieb S Oehrlein
exaly  

Dry Etching for Microelectronics

1984
openaire   +1 more source

Dry Etching Processes

2015
Salman B. Inayat, Avinash P. Nayak, V. J. Logeeswaran, M. Saif Islam   +3 more
openaire   +1 more source

Dry etching of bulk single-crystal ZnO in CH 4 /H 2 -based plasma chemistries

Applied Surface Science, 2006
Rohit Khanna, Stephen J Pearton
exaly  

Chemical Dry Etching

2016
openaire   +1 more source

Dry etching and sputtering

Philosophical Transactions Series A, Mathematical, Physical, and Engineering Sciences, 2004
exaly  

Dry etching and induced damage

Microelectronic Engineering, 1996
exaly  

Dry Etching Technologies of Optical Device and III-V Compound Semiconductors

IEICE Transactions on Electronics, 2017
exaly  

Dry Etching of Photoresists

2007
openaire   +1 more source

Dry phosphorus silicate glass etching for multicrystalline silicon solar cells

Progress in Photovoltaics: Research and Applications, 2003
exaly