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Improved Emitters by Dry Etching

2010
25th European Photovoltaic Solar Energy Conference and Exhibition / 5th World Conference on Photovoltaic Energy Conversion, 6-10 September 2010, Valencia, Spain; 1965 ...
Seiffe, Johannes   +6 more
openaire   +1 more source

Dry Etching (Part 1): Particulate Contamination Due to Dry Etching

1998
For the mass production of 64 kbit DRAMs, 3 μm design-rule devices, interest in the change from wet to dry etching processes has increased greatly.
openaire   +1 more source

Piezoelectric aluminum nitride thin-films: A review of wet and dry etching techniques

Microelectronic Engineering, 2022
CARLOS Calaza   +2 more
exaly  

Dry Etching

2012
Biana Godin   +31 more
openaire   +2 more sources

Fabrication of Germanium Tin Microstructures Through Inductively Coupled Plasma Dry Etching

IEEE Nanotechnology Magazine, 2021
Peng Cui, , James Kolodzey
exaly  

Dry etching and sputtering

Philosophical Transactions Series A, Mathematical, Physical, and Engineering Sciences, 2004
C D W Wilkinson
exaly  

Dry etching and induced damage

Microelectronic Engineering, 1996
T Zijlstra
exaly  

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