Results 21 to 30 of about 245,592 (331)

Focused electron beam induced deposition meets materials science [PDF]

Microelectronic Engineering, 2018
Focused electron beam induced deposition (FEBID) is a direct-write method for the fabrication of nanostructures whose lateral resolution rivals that of advanced electron lithography but is in addition capable of creating complex three-dimensional nano-architectures.
M. Huth, F. Porrati, O.V. Dobrovolskiy
openaire   +4 more sources

Mechanical Properties of 3D Nanostructures Obtained by Focused Electron/Ion Beam-Induced Deposition: A Review

Micromachines, 2020
This article reviews the state-of-the -art of mechanical material properties and measurement methods of nanostructures obtained by two nanoscale additive manufacturing methods: gas-assisted focused electron and focused ion beam-induced deposition using ...
I. Utke, J. Michler, R. Winkler, H. Plank   +3 more
semanticscholar   +3 more sources

3D Nanoprinting via laser-assisted electron beam induced deposition: growth kinetics, enhanced purity, and electrical resistivity. [PDF]

Beilstein J Nanotechnol, 2017
We investigate the growth, purity, grain structure/morphology, and electrical resistivity of 3D platinum nanowires synthesized via electron beam induced deposition with and without an in situ pulsed laser assist process which photothermally couples to ...
Lewis BB, Winkler R, Sang X, Pudasaini PR, Stanford MG, Plank H, Unocic RR, Fowlkes JD, Rack PD.   +8 more
europepmc   +2 more sources

Electron Flux Controlled Switching Between Electron Beam Induced Etching and Deposition [PDF]

Microscopy and Microanalysis, 2006
Extended abstract of a paper presented at Microscopy and Microanalysis 2006 in Chicago, Illinois, USA, July 30 – August 3 ...
Milos Toth, Charlene J. Lobo, Gavin Hartigan, W. Ralph Knowles   +3 more
openaire   +3 more sources

Coordination and organometallic precursors of group 10 and 11: Focused electron beam induced deposition of metals and insight gained from chemical vapour deposition, atomic layer deposition, and fundamental surface and gas phase studies

Coordination chemistry reviews, 2022
I. Utke, P. Swiderek, K. Höflich, K. Madajska, J. Jurczyk, P. Martinović, I. Szymańska   +6 more
semanticscholar   +2 more sources

The role of low-energy electrons in focused electron beam induced deposition: four case studies of representative precursors

Beilstein Journal of Nanotechnology, 2015
Focused electron beam induced deposition (FEBID) is a single-step, direct-write nanofabrication technique capable of writing three-dimensional metal-containing nanoscale structures on surfaces using electron-induced reactions of organometallic precursors.
R. M. Thorman, R. Kumar T P, D. Fairbrother, O. Ingólfsson   +3 more
semanticscholar   +2 more sources

A tunable strain sensor using nanogranular metals [PDF]

Sensors, 2010
This paper introduces a new methodology for the fabrication of strain-sensor elements for MEMS and NEMS applications based on the tunneling effect in nano-granular metals.
Schwalb, Christian H., Grimm, Christina, Baranowski, Markus, Sachser, Roland, Porrati, Fabrizio, Reith, Heiko, Das, Pintu, Müller, Jens, Völklein, Friedemann, Kaya, Alexander, Huth, Michael   +10 more
core   +3 more sources

Ligand Size and Carbon-Chain Length Study of Silver Carboxylates in Focused Electron-Beam-Induced Deposition. [PDF]

Nanomaterials (Basel), 2023
Gas-assisted focused electron-beam-induced deposition is a versatile tool for the direct writing of complex-shaped nanostructures with unprecedented shape fidelity and resolution.
Jurczyk J, Höflich K, Madajska K, Berger L, Brockhuis L, Edwards TEJ, Kapusta C, Szymańska IB, Utke I.   +8 more
europepmc   +2 more sources

Long-Term Performance of Magnetic Force Microscopy Tips Grown by Focused Electron Beam Induced Deposition. [PDF]

Sensors (Basel), 2023
Escalante-Quiceno AT, Novotný O, Neuman J, Magén C, De Teresa JM.   +4 more
europepmc   +3 more sources

Comparison between Focused Electron/Ion Beam-Induced Deposition at Room Temperature and under Cryogenic Conditions

Micromachines, 2019
In this contribution, we compare the performance of Focused Electron Beam-induced Deposition (FEBID) and Focused Ion Beam-induced Deposition (FIBID) at room temperature and under cryogenic conditions (the prefix “Cryo” is used here for cryogenic).
J. D. de Teresa, P. Orús, R. Córdoba, P. Philipp   +3 more
semanticscholar   +3 more sources