Results 251 to 260 of about 18,755 (260)

3. Electron Beam Lithography

1994
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Fast electron-beam lithography

Microelectronics Reliability, 1982
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Electron Beam Lithography (EBL)

2012
Mélanie Auffan, Catherine Santaella, Alain Thiéry, Christine Paillès, Jérôme Rose, Wafa Achouak, Antoine Thill, Armand Masion, Mark Wiesner, Jean-Yves Bottero, Florence Mouchet, Périne Landois, Floriane Bourdiol, Isabelle Fourquaux, Pascal Puech, Emmanuel Flahaut, Laury Gauthier, Malgorzata J. Rybak-Smith, Youngjun Song, Michael J. Heller, David Holmes, Benjamin L. J. Webb, Tao Sun, Theresa S. Mayer, Jeffrey S. Mayer, Christine D. Keating, Amitabha Ghosh, Ilya V. Pobelov, Chen Li, Thomas Wandlowski, Michael G. Helander, Zhibin Wang, Zheng-Hong Lu, Francesca Carpino, Larry R. Gibson, Dane A. Grismer, Paul W. Bohn, Nezih Pala, Mustafa Karabiyik, Alexandra Porter, Eva McGuire, Guoqiang Xie, Alejandro Lopez-Bezanilla, Stephan Roche, Eduardo Cruz-Silva, Bobby G. Sumpter, Vincent Meunier, Michael J. Laudenslager, Wolfgang M. Sigmund, Neal A. Hall, CJ Kim, Guoxing Wang, Robert J. Greenberg, Chimaobi Mbanaso, Gregory Denbeaux, Claire Coutris, Erik J. Joner   +56 more
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Low energy electron-beam proximity projection lithography: Discovery of a missing link

Journal of Vacuum Science & Technology an Official Journal of the American Vacuum Society B, Microelectronics Processing and Phenomena, 1999
exaly  

Instrumentation for electron beam lithography

Microelectronics Reliability, 1975
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Instrumentation for electron beam lithography

IEEE Transactions on Magnetics, 1974
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Electron Beam Lithography Systems

2007
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Electron Beam Lithography of Polyimides

2017
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Photolithography and Electron-beam lithography

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Correction to: Electron Beam Lithography

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