Results 251 to 259 of about 18,795 (259)

Low energy electron-beam proximity projection lithography: Discovery of a missing link

Journal of Vacuum Science & Technology an Official Journal of the American Vacuum Society B, Microelectronics Processing and Phenomena, 1999
exaly  

3. Electron Beam Lithography

1994
openaire   +1 more source

Electron-beam lithography machines

1980
DONALD R. HERRIOTT, GEORGE R. BREWER
openaire   +1 more source

Fast electron-beam lithography

Microelectronics Reliability, 1982
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Instrumentation for electron beam lithography

Microelectronics Reliability, 1975
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Apparatus for electron beam lithography

1986
SAITOU NORIO, OZASA SUSUMU, MATSUZAKA TAKASHI   +2 more
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Electron beam lithography system

1997
TANAKA KAZUMITSU, TAKASHIMA SUSUMU, ABE JUNJI   +2 more
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Electron beam lithography system

2004
KAWANO HAJIME, WAKITA MINORU, KAMADA MASATO, YODA HARUO   +3 more
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Photolithography and Electron-beam lithography

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