Results 241 to 250 of about 18,755 (260)

Electron Beam Lithography of Nanostructures

2011
D.M. Tennant, A.R. Bleier
openaire   +1 more source

Electron beam array lithography

Vacuum, 1985
openaire   +1 more source

Challenges in 1 Teradot∕in.2 dot patterning using electron beam lithography for bit-patterned media

Journal of Vacuum Science & Technology B, 2007
Xiaomin Yang, Kim Lee, David Kuo
exaly  

Electron Beam Lithography

2007
openaire   +1 more source

Fabrication of submicrometric magnetic structures by electron-beam lithography

Journal of Applied Physics, 1998
A Hoffmann, J Noguès, J M George
exaly  

Scattering with angular limitation projection electron beam lithography for suboptical lithography

Journal of Vacuum Science & Technology an Official Journal of the American Vacuum Society B, Microelectronics Processing and Phenomena, 1997
exaly  

Electron-beam lithography machines

1980
DONALD R. HERRIOTT, GEORGE R. BREWER
openaire   +1 more source

Electron beam lithography for 0.13 μm manufacturing

Journal of Vacuum Science & Technology an Official Journal of the American Vacuum Society B, Microelectronics Processing and Phenomena, 1997
exaly  

Electron Beam Lithography (EBL)

2016
Nezih Pala, Mustafa Karabiyik
openaire   +1 more source

Fabrication of high-density nanostructures by electron beam lithography

Journal of Vacuum Science & Technology an Official Journal of the American Vacuum Society B, Microelectronics Processing and Phenomena, 1998
exaly