Results 241 to 250 of about 18,795 (259)

Resists for Electron Beam Lithography

1984
TOSHIAKI TAMAMURA, SABURO IMAMURA, SHUNGO SUGAWARA   +2 more
openaire   +1 more source

Low voltage alternative for electron beam lithography

Journal of Vacuum Science & Technology an Official Journal of the American Vacuum Society B, Microelectronics Processing and Phenomena, 1992
Browning R, Pease R F W, Owen G
exaly  

Simulation of electron-beam lithography

Cybernetics, 1989
V. P. Derkach, L. V. Starikova, E. N. Levchenko   +2 more
openaire   +1 more source

Submicrometer Functionalization of Porous Silicon by Electron Beam Lithography

Advanced Materials, 2003
Luca Boarino, G Amato, A M Rossi
exaly  

Electron beam lithography

2002
ZHU ZIEQING, KATSAP VICTOR, MUNRO ERIC, ROUSE JOHN ANDREW, WASKIEWICZ WARREN K   +4 more
openaire   +1 more source

Electron beam array lithography

Vacuum, 1985
openaire   +1 more source

Electron Beam Lithography (EBL)

2016
Nezih Pala, Mustafa Karabiyik
openaire   +1 more source

Electron Beam Lithography

2007
openaire   +1 more source

Scattering with angular limitation projection electron beam lithography for suboptical lithography

Journal of Vacuum Science & Technology an Official Journal of the American Vacuum Society B, Microelectronics Processing and Phenomena, 1997
exaly  

X-Ray Lithography: A Complementary Technique to Electron Beam Lithography

Journal of Vacuum Science and Technology, 1973
exaly