Results 221 to 230 of about 18,755 (260)

Electron beam lithography

Vacuum, 1985
openaire   +2 more sources

Electron Beam Lithography

2022
openaire   +1 more source

Resolution Limits of Electron-Beam Lithography toward the Atomic Scale

Nano Letters, 2013
Vitor R Manfrinato, Dong Su, Huigao Duan   +2 more
exaly  

Proximity effect in electron‐beam lithography

Journal of Vacuum Science and Technology, 1975
T H P Chang, Chang T H P
exaly  

Combinatorial Optimization of a Molecular Glass Photoresist System for Electron Beam Lithography

Advanced Materials, 2011
Christian Neuber, Christopher K Ober, Hans-Werner Schmidt   +2 more
exaly  

Fabrication and Structural Evaluation of Beaded Inorganic Nanostructures Using Soft-Electron-Beam Lithography

Advanced Materials, 2007
Tao Sun, Vinayak P Dravid
exaly  

Direct Writing of Patterned Ceramics Using Electron-Beam Lithography and Metallopolymer Resists

Advanced Materials, 2004
D Grozea, M R Freeman
exaly  

Electron beam lithography: resolution limits and applications

Applied Surface Science, 2000
F Carcenac, Yong Chen, A Lebib
exaly  

Electron Beam Lithography

2006
openaire   +1 more source

High resolution optical lithography or high throughput electron beam lithography: The technical struggle from the micro to the nano-fabrication evolution

Microelectronic Engineering, 2015
Shinji Okazaki
exaly