Results 221 to 230 of about 18,795 (259)

Resolution Limits of Electron-Beam Lithography toward the Atomic Scale

Nano Letters, 2013
Karl Berggren, Dong Su, Huigao Duan
exaly  

Proximity effect in electron‐beam lithography

Journal of Vacuum Science and Technology, 1975
Chang T H P
exaly  

Fabrication of high-density nanostructures by electron beam lithography

Journal of Vacuum Science & Technology an Official Journal of the American Vacuum Society B, Microelectronics Processing and Phenomena, 1998
Scherer A
exaly  

Electron Beam Lithography

2022
openaire   +1 more source

High resolution optical lithography or high throughput electron beam lithography: The technical struggle from the micro to the nano-fabrication evolution

Microelectronic Engineering, 2015
Shinji Okazaki
exaly  

Sub-10 nm electron beam lithography using cold development of poly(methylmethacrylate)

Journal of Vacuum Science & Technology an Official Journal of the American Vacuum Society B, Microelectronics Processing and Phenomena, 2004
Marya Lieberman, Bernstein Gary H
exaly  

Electron beam lithography system

1995
PFEIFFER HANS CHRISTIAN, STICKEL WERNER
openaire   +3 more sources

Projection electron-beam lithography: A new approach

Journal of Vacuum Science & Technology an Official Journal of the American Vacuum Society B, Microelectronics Processing and Phenomena, 1991
Gibson J M, Berger S D, Farrow R C
exaly  

Electron Beam Lithography

2006
openaire   +1 more source

Combinatorial Optimization of a Molecular Glass Photoresist System for Electron Beam Lithography

Advanced Materials, 2011
Hans-Werner Schmidt, Christopher Ober, Christian Neuber   +2 more
exaly