Results 1 to 10 of about 4,764 (162)
Low-Voltage and High-Reliability RF MEMS Switch with Combined Electrothermal and Electrostatic Actuation [PDF]
Micromachines, 2021 In this paper, we report a novel laterally actuated Radio Frequency (RF) Microelectromechanical Systems (MEMS) switch, which is based on a combination of electrothermal actuation and electrostatic latching hold.
Yong Zhu, Jitendra Pal
exaly +4 more sources
Electrostatically actuated encased cantilevers [PDF]
Beilstein Journal of Nanotechnology, 2018 Background: Encased cantilevers are novel force sensors that overcome major limitations of liquid scanning probe microscopy. By trapping air inside an encasement around the cantilever, they provide low damping and maintain high resonance frequencies for ...
Benoit X. E. Desbiolles +4 more
doaj +6 more sources
Vacuum-gap electrostatic multilayer actuators for space robotics [PDF]
Nature CommunicationsActuation of space robots poses significant challenges in ensuring operation in vacuum. Conventional electromagnetic technologies face inherent limitations due to heat dissipation and difficulties in lubrication, whereas recent electrostatic alternatives,
Ion-Dan Sîrbu +6 more
doaj +2 more sources
Strain Engineering of Germanium Nanobeams by Electrostatic Actuation. [PDF]
Sci Rep, 2019 AbstractGermanium (Ge) is a promising material for the development of a light source compatible with the silicon microfabrication technology, even though it is an indirect-bandgap material in its bulk form. Among various techniques suggested to boost the light emission efficiency of Ge, the strain induction is capable of providing the wavelength ...
Ayan A +6 more
europepmc +5 more sources
Real-time correction of gain nonlinearity in electrostatic actuation for whole-angle micro-shell resonator gyroscope [PDF]
Microsystems & NanoengineeringMEMS gyroscopes are well known for their outstanding advantages in Cost Size Weight and Power (CSWaP), which have inspired great research attention in recent years.
Sheng Yu +7 more
doaj +2 more sources
Electrostatically actuated MEMS resonators for magnetic and electric field sensing: a review [PDF]
Microsystems & NanoengineeringRecent advances in microelectromechanical systems (MEMS) resonators have enabled the development of compact devices capable of precise magnetic and electric field sensing.
Daeyeon Koh, Yohan Jung, Jongbaeg Kim
doaj +2 more sources
Ultralight soft electrostatic actuators based on solid-liquid-gas architectures [PDF]
Nature CommunicationsSoft actuators enable versatile and adaptable robots capable of operating in unstructured environments and close to humans. Soft electrostatic actuators utilizing electrohydraulic principles are particularly promising, combining all-around actuation ...
Hyeong-Joon Joo +6 more
doaj +2 more sources
Materials & Design, 2023 Photo-induced actuators enable potential applications involving soft robots, biomedical engineering, and microelectromechanical system due to the contactless energy supply and high spatial and temporal controllability of light.
Zhen Lv +3 more
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Study on the Method of Charge Accumulation Suppression of Electrostatic Suspended Accelerometer
Sensors, 2022 Electrostatic suspended accelerometers (ESAs) are widely used in high accuracy acceleration measurement. However, there exist accumulated charges on the isolated mass which damage the accuracy and the stability of ESAs. In this paper, we propose to apply
Jiefeng Dai +4 more
doaj +1 more source
Electro-responsive actuators based on graphene
The Innovation, 2021 Electro-responsive actuators (ERAs) hold great promise for cutting-edge applications in e-skins, soft robots, unmanned flight, and in vivo surgery devices due to the advantages of fast response, precise control, programmable deformation, and the ease of ...
Yong-Lai Zhang +5 more
doaj +1 more source