Results 1 to 10 of about 232,056 (245)
Micromachines, 2021 In this paper, we report a novel laterally actuated Radio Frequency (RF) Microelectromechanical Systems (MEMS) switch, which is based on a combination of electrothermal actuation and electrostatic latching hold.
Yong Zhu, Jitendra Pal
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Electrostatically actuated encased cantilevers [PDF]
Beilstein Journal of Nanotechnology, 2018 Background: Encased cantilevers are novel force sensors that overcome major limitations of liquid scanning probe microscopy. By trapping air inside an encasement around the cantilever, they provide low damping and maintain high resonance frequencies for ...
Benoit X. E. Desbiolles +4 more
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Materials & Design, 2023 Photo-induced actuators enable potential applications involving soft robots, biomedical engineering, and microelectromechanical system due to the contactless energy supply and high spatial and temporal controllability of light.
Zhen Lv +3 more
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Study on the Method of Charge Accumulation Suppression of Electrostatic Suspended Accelerometer
Sensors, 2022 Electrostatic suspended accelerometers (ESAs) are widely used in high accuracy acceleration measurement. However, there exist accumulated charges on the isolated mass which damage the accuracy and the stability of ESAs. In this paper, we propose to apply
Jiefeng Dai +4 more
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Electro-responsive actuators based on graphene
The Innovation, 2021 Electro-responsive actuators (ERAs) hold great promise for cutting-edge applications in e-skins, soft robots, unmanned flight, and in vivo surgery devices due to the advantages of fast response, precise control, programmable deformation, and the ease of ...
Yong-Lai Zhang +5 more
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Modeling the Electrostatic Actuation of Nanomechanical Pillar Dimers
Frontiers in Mechanical Engineering, 2021 With their unparalleled mass sensitivity, enabling single-molecule mass spectrometry, nanomechanical resonators have the potential to considerably improve existing sensor technology.
Andreas Kainz +3 more
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Actuators, 2020 Nowadays, the concept of programmable matter paves the way for promising applications such as reshaping an object to test different configurations, modeling or rapid prototyping.
Romain Catry +3 more
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Dynamic Analysis of a Micro Beam-Based Tactile Sensor Actuated by Fringing Electrostatic Fields
Micromachines, 2019 A new kind of fringing electrostatic actuation mode is developed. In this new actuation mode, the expression of fringing electrostatic force is found. The nonlinear dynamic analysis of this new actuation mode is presented by using the Method of Multiple ...
Zhichong Wang +3 more
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Inchworm Motors and Beyond: A Review on Cooperative Electrostatic Actuator Systems
Actuators, 2023 Having benefited from technological developments, such as surface micromachining, high-aspect-ratio silicon micromachining and ongoing miniaturization in complementary metal–oxide–semiconductor (CMOS) technology, some electrostatic actuators became ...
Almothana Albukhari, Ulrich Mescheder
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Low-Actuation Voltage MEMS Digital-to-Analog Converter with Parylene Spring Structures
Sensors, 2015 We propose an electrostatically-actuated microelectromechanical digital-to-analog converter (M-DAC) device with low actuation voltage. The spring structures of the silicon-based M-DAC device were monolithically fabricated using parylene-C.
Cheng-Wen Ma +4 more
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