Modeling the Electrostatic Actuation of Nanomechanical Pillar Dimers
With their unparalleled mass sensitivity, enabling single-molecule mass spectrometry, nanomechanical resonators have the potential to considerably improve existing sensor technology.
Andreas Kainz +3 more
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A Crawler Climbing Robot Integrating Electroadhesion and Electrostatic Actuation
Previous electroadhesive climbing robots generally employed typical electromagnetic motors, which spoiled some of the advantages of electroadhesion such as it being light, thin and flexible. To improve these, an integration of electrostatic actuation and
Hongqiang Wang +2 more
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Nowadays, the concept of programmable matter paves the way for promising applications such as reshaping an object to test different configurations, modeling or rapid prototyping.
Romain Catry +3 more
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On the investigation of a reliable actuation control method for ohmic RF MEMS switches [PDF]
This is a post-print version of the article. The official published version can be accessed from the link below - Copyright @ 2011 ElsevierEfficient control of RF MEMS switches is a very important issue as it is correlated to main failure mechanisms ...
Nilavalan, R +3 more
core +1 more source
Inchworm Motors and Beyond: A Review on Cooperative Electrostatic Actuator Systems
Having benefited from technological developments, such as surface micromachining, high-aspect-ratio silicon micromachining and ongoing miniaturization in complementary metal–oxide–semiconductor (CMOS) technology, some electrostatic actuators became ...
Almothana Albukhari, Ulrich Mescheder
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Dynamic Analysis of a Micro Beam-Based Tactile Sensor Actuated by Fringing Electrostatic Fields
A new kind of fringing electrostatic actuation mode is developed. In this new actuation mode, the expression of fringing electrostatic force is found. The nonlinear dynamic analysis of this new actuation mode is presented by using the Method of Multiple ...
Zhichong Wang +3 more
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Low-Actuation Voltage MEMS Digital-to-Analog Converter with Parylene Spring Structures
We propose an electrostatically-actuated microelectromechanical digital-to-analog converter (M-DAC) device with low actuation voltage. The spring structures of the silicon-based M-DAC device were monolithically fabricated using parylene-C.
Cheng-Wen Ma +4 more
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Experimental characterization of pull-in parameters for an electrostatically actuated cantilever
MEMS-NEMS applications extensively use micro-nano cantilever structures as actuation system, thanks to their intrinsically simple end efficient configuration.
A. Sorrentino +3 more
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Resistive damping implementation as a method to improve controllability in stiff ohmic RF-MEMS switches [PDF]
This paper presents in detail the entire procedure of calculating the bias resistance of an ohmic RF-MEMS switch, controlled under resistive damping (charge drive technique).
Nilavalan, R, Spasos, M
core +1 more source
A Method to Enhance Stroke Level of a MEMS Micromirror with Repulsive Electrostatic Force
This paper presents a method to enhance the stroke level of a MEMS micromirror that, unlike conventional micromirrors, is actuated using a repulsive electrostatic force.
Niwit Aryal, Arezoo Emadi
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