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An on-line calibration hydrophone with electrostatic actuator
Science China Information Sciences, 2016On-line sensitivity calibration of hydrophones is of considerable significance for their practical application. An on-line method using an electrostatic actuator is proposed in this paper for a radially polarized cylindrical piezoelectric hydrophone. The theory of this calibration method is analyzed.
Zhaoli Yan, Xiaobin Cheng
exaly +2 more sources
Stability of Electrostatic Actuation of MEMS
Physica Scripta, 2004The increased electrostatic stability of MEMS sensors enables new application areas for the sensors, and decreases the manufacturing costs of existing products. Especially in the applications where the MEMS component is operated under bias voltage close to the pull-in point, the undesired instability phenomenon becomes a major source of inaccuracy.
Kärkkäinen, Anu +4 more
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Electrostatically Driven Nanoballoon Actuator
Nano Letters, 2016We demonstrate an inflatable nanoballoon actuator based on geometrical transitions between the inflated (cylindrical) and collapsed (flattened) forms of a carbon nanotube. In situ transmission electron microscopy experiments employing a nanoelectromechanical manipulator show that a collapsed carbon nanotube can be reinflated by electrically charging ...
Hamid Reza, Barzegar +8 more
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Study of micro-actuator with electrostatic actuating
SPIE Proceedings, 2006The micro-actuator with the torsion beam and the cantilever beam on silicon is designed and analyzed, which is actuated by electrostatic force. Based on the torsion dynamics theory, the technique and relative formula are presented for analyzing the actuating voltage and the switching time, on which the effect of the air squeeze film damping is already ...
Dong-Ming Sun +4 more
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Anisotropic electrostatic actuation
Journal of Physics D: Applied Physics, 2009We examine the theoretical basis for the enhancement of classical, dielectric actuation by first imposing an elongation ('pre-strain') in one of the two directions in the plane of the working elastomeric filling between flexible electrodes. Such anisotropic actuation has been shown experimentally to be effective in delivering more mechanical work from ...
D Corbett, M Warner
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Electrostatic micromechanic actuators
Journal of Micromechanics and Microengineering, 1992Actuators based on the electrostatic principle are one of the most important in microsystem technology. In the future, actuators of 1D or 2D type will be necessary in many fields, especially in optical deflection and scanning systems. They will solve many different problems: device fabrication processes, surface-deformation, reflection factors ...
U Breng +4 more
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The modeling of electrostatic forces in small electrostatic actuators
IEEE Technical Digest on Solid-State Sensor and Actuator Workshop, 2003The basic elements of electrostatic devices (conductors, dielectrics, insulators, electrets, and ferroelectrics) are reviewed and it is shown that the modeling of electrostatic forces is a very different, and in many ways a more difficult, undertaking than the modeling of magnetic interactions; the difference between the real-world behavior of ...
R.H. Price, J.E. Wood, S.C. Jacobsen
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