Results 261 to 270 of about 21,803 (297)

Electrostatically Actuated Compliant Microvalve

Volume 9: Micro- and Nano-Systems Engineering and Packaging, Parts A and B, 2012
We present an electrostatically operated normally opened microvalve for gas flow control. The valve is made of thermoplastic materials and uses a new fabrication method. The voltage required to close the 0.9 mm wide microvalve was ∼350 V for fluid (air) pressure ∼1kPa.
Tatjana Dankovic, Alan Feinerman
openaire   +1 more source

Electrostatically actuated micromechanical switches

Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 1997
Micromechanical switches and relays realized by a simple surface micromachining process are presented. The devices use a nickel cantilever beam and gold-to-gold electrical contact, and are electrostatically actuated. They have lifetimes exceeding 109 cycles, and a current handling capability of 150 mA.
S. Majumder, N. E. McGruer, P. M. Zavracky   +2 more
openaire   +1 more source

Modeling Electrostatic MEMS Actuator

2021 28th IEEE International Conference on Electronics, Circuits, and Systems (ICECS), 2021
Zdenek Kolka, Viera Biolková, Dalibor Biolek, Zdenek Biolek   +3 more
openaire   +1 more source

Characterization of electrostatic glass actuators

Journal of Applied Physics, 2003
Electrostatic glass actuators are a promising concept for various applications. The use of the interaction between glassy substances and electrostatic fields allows synchronous propulsion akin to the electret actuator. Even though some properties of electrostatic glass motors have been observed and described, a characterization is still missing.
R. Moser, R. Wüthrich, L. Sache, T. Higuchi, H. Bleuler   +4 more
openaire   +1 more source

MICROPUMP WITH ELECTROSTATIC ACTUATION

2016
A micropump includes: a pumping chamber (20), between a first semiconductor substrate (7) and a second semiconductor substrate (8) bonded to each other; an inlet valve (21), having an inlet shutter element (27) between an inlet passage (18) and the pumping chamber (20); an outlet valve (22), having an outlet shutter element (33) between the pumping ...
R. Ardito, E. Bertarelli, A. Corigliano, M. Ferrera   +3 more
openaire   +1 more source

Macromodeling of an Electrostatic Torsional Actuator

2001
We present an efficient methodology for setting up MEMS macromodels which are based on a physical device description and lead to tractable mathematical relations for the device operation. Since design and technology parameters are input parameters of the resulting model, our approach is in particular suited for design studies. For demonstration we have
Robert Sattler, Florian Plötz, Gerhard Wachutka   +2 more
openaire   +1 more source

Section 4: Electrostatic Actuators

2009
This chapter contains sections titled: The Principle of an Electrostatic Linear Actuator Manufactured by Silicon Micromachining Design Considerations for a Practical Electrostatic Micro-Motor SCOFSS: A Small Cantilevered Optical Fiber Servo System Microactuators for Aligning Optical Fibers Large Displacement Linear Actuator
openaire   +1 more source

Position Sensing of Electrostatic MEMS Actuator

2022 29th IEEE International Conference on Electronics, Circuits and Systems (ICECS), 2022
Zdenek Kolka, Viera Biolková, Dalibor Biolek   +2 more
openaire   +1 more source

Tri-electrode MEMS electrostatic actuator with lower control voltage and higher stroke for actuator array implementations

Journal of Electrostatics, 2021
Mehdi Allameh, Cyrus Shafai
exaly  

Electrostatic Actuators

2004
Robert W. Johnstone, M. Parameswaran
openaire   +1 more source