Results 251 to 260 of about 21,803 (297)

Nanoscale electrostatic actuators in liquid electrolytes

Journal of Colloid and Interface Science, 2006
Equilibrium and energy analyses were performed for an electrostatic actuator consisting of two plane parallel electrodes, operated using DC voltages, separated by a liquid electrolyte. One electrode is fixed, and the other electrode is connected to a spring and is free to move.
James G, Boyd, Doyoung, Kim
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On electrostatically actuated microsensors

SPIE Proceedings, 2010
Mass deposition changes resonance frequencies of structures. Resonator sensitivity, defined as a fraction of change in frequency per unit deposited mass, is found for microcantilever sensors electrostatically actuated to include fringe and Casimir effects. These actuation forces produce nonlinear parametric oscillations.
Dumitru I. Caruntu, Martin W. Knecht
openaire   +1 more source

Fabrication of an Electrothermally Actuated Electrostatic Microgripper

International Journal of Nonlinear Sciences and Numerical Simulation, 2002
A novel electrostatic microgripper, which can handle micro objects with the electrostatic force, is designed and fabricated. It consists of gripping part with one inner and two outer electrodes, and releasing part with an electrothermal actuator. It grips micro objects using electric field generated between the electrodes, and releases them using the ...
Lee, S.H., Lee, K.-C., Lee, S.S. Lee, Seung Seob, Oh, H.-S.   +3 more
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Electrostatic parallelogram actuators

TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers, 2002
Surface micromachined actuators composed of polysilicon, parallelogram flexible supports are described. The parallelogram actuators transform both the direction and the magnitude of the attractive, electrostatic force developed between the drive electrodes.
N. Takeshima, K.J. Gabriel, M. Ozaki, J. Takahashi, H. Horiguchi, H. Fujita   +5 more
openaire   +1 more source

Microswitch with Mixed Piezoelectric and Electrostatic Actuation

TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference, 2007
In this article, a new concept of microswitch is investigated with the objective to decrease the actuation voltage. It consists in a component with two kinds of actuation mechanisms: piezoelectric actuation and electrostatic actuation. The structures were realized with a technology compatible with CMOS technology.
Chapuis, Francois, Defay, Emmanuel, Casset, Fabrice, Manceau, Jean-François, Bastien, Francois, Aïd, Marc   +5 more
openaire   +2 more sources

Repetitive Control for an Electrostatic Microbridge Actuator

Design Engineering, Parts A and B, 2005
Electrostatic microactuators are used extensively in MEMS sensors, RF switches, and microfluidic pumps. Due to high bandwidth operation, however, reduction of residual vibration using feedback control is diffcult to implement. This paper designs, proves stability, and simulates a feedforward repetitive controller for an electrostatic microbridge ...
Zhao, Haiyu, Rahn, Christopher D., CANBOLAT, HÜSEYİN   +2 more
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Surface-normal electrostatic/pneumatic actuator

[1992] Proceedings IEEE Micro Electro Mechanical Systems, 1992
An electrostatically driven, pneumatic actuator able to generate surface-normal deflections is described. Two sealed, air-filled, concentric chambers that share a membrane and are connected by channels make up the actuator. The portion of the membrane suspended over the outer chamber serves as the movable electrode plate while the conducting substrate ...
Gabriel, Kaigham, Tabata, O, Shimaoka, K, Sugiyama, S, Fujita, H   +4 more
openaire   +1 more source

Micromechanical relay with electrostatic actuation

Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97), 2002
Three variants of electrostatically driven microrelays are reported. The concepts of these microrelays are a cantilever beam, a fixed-fixed beam and a torsion beam with a double contact configuration. Because of the complete fabrication by surface micromachining technology, there is no need for a chip bonding process.
I. Schiele, B. Hillerich, F. Kozlowski, C. Evers   +3 more
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Electrostatically actuated window blinds

Journal of Electrostatics, 2001
Abstract An electrostatic method for actuating window blinds was recently developed by the authors in work that is documented elsewhere. The method was developed in an experimental effort without the help of predictive tools. This paper examines that problem in more detail and formulates an electrostatic model for these systems. The complexity of the
Scott F. Kiefer, Larry M. Silverberg, Manoel L. Gonzalez   +2 more
openaire   +1 more source

Dimpled electrostatic MEMS actuators

Journal of Applied Physics, 2019
We present electrostatic Micro-Electromechanical System actuators equipped with dimples and contact pads. The introduction of dimples and contact pads is shown to prevent stiction between the actuator and bottom electrodes and minimize dielectric charging and to eliminate multi-valuedness in the response.
A. Alneamy, M. Al-Ghamdi, S. Park, M. Khater, E. Abdel-Rahman, G. Heppler   +5 more
openaire   +1 more source