Results 191 to 200 of about 279,960 (200)
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Dynamics of electrostatic microelectromechanical systems actuators
Journal of Mathematical Physics, 2012Yisong Yang, Ruifeng Zhang
exaly
Analysis of the extended operation range of electrostatic actuators by current-pulse drive
Sensors and Actuators A: Physical, 2001Angel Rodríguez, L Castañer
exaly
Materials selection for microfabricated electrostatic actuators
Sensors and Actuators A: Physical, 2003S M Spearing
exaly
Bulk micromachined silicon comb-drive electrostatic actuators with diode isolation
Sensors and Actuators A: Physical, 1997R A Lawes, R R A Syms
exaly
A method to study and enhance the energy efficiency of soft electrostatic actuators
Proceedings of the National Academy of Sciences of the United States of AmericaToshihiko Fukushima +2 more
exaly
Fabrication and dynamic testing of electrostatic actuators with p+ silicon diaphragms
Sensors and Actuators A: Physical, 1995exaly
Statistical position repeatability of surface micromachined electrostatic actuators
Thomas Bifanoexaly

