Results 111 to 120 of about 1,139 (207)

High sensitivity CMOS-MEMS relative humidity sensor based on electrothermal actuation

, 2017
This paper presents a high sensitivity CMOSMEMS humidity sensor based on electrothermal actuation for application in indoor relative humidity monitoring.
Jawatankuasa Kerja PSM UTeM
core  

Electrothermal actuation of vanadium dioxide for tunable capacitors and microwave filters with integrated microheaters

We report the fabrication, modeling and characterization of novel microwave tunable capacitors based on the metal-insulator transition (MIT) of Vanadium Dioxide (VO2) as a future replacement solution for microelectromechanical capacitive switches.
Paone, Antonio, Schueler, Andreas, Fernández-Bolaños, Montserrat, Moldovan, Clara Fausta, Vitale, Wolfgang Amadeus, Petit, Luca, Ionescu, Mihai Adrian   +6 more
core   +1 more source

Electrothermal Actuators for SiO₂ Photonic MEMS.

Micromachines
This paper describes the design, fabrication and characterization of electrothermal bimorph actuators consisting of polysilicon on top of thick (>10 μ m ) silicon dioxide beams. This material platform enables the integration of actuators with photonic waveguides, producing mechanically-flexible photonic waveguide structures that are positionable. These
Tjitte-Jelte, Peters, Marcel, Tichem
openaire   +1 more source

Single-process 3D-printed bimorph electrothermal soft actuators

The manufacturing of bimorph, electrothermal actuators conventionally requires multiple processing steps, which limits design flexibility and customization.
Krivic, Gašper, Slavič, Janko
core   +1 more source

Pulse and DC operation lifetimes of bent-beam electrothermal actuators,”

, 2001
This paper reports on lifetime studies of polysilicon and p ++ Si electrothermal actuators designed for rectilinear displacements. Measurements show that degradation patterns for displacement amplitude can be linked to design variables and operating ...
Long Que, Lisa Otradovec, Yogesh B Gianchandani, Andrew D Oliver   +3 more
core  

On-Chip AC Electrothermal Pump for Pulsatile Perfusion. [PDF]

Micromachines (Basel)
Kawata I, Kobayashi S, Ichikawa Y, Motosuke M.   +3 more
europepmc   +1 more source

Thermal Effects in Microfluidic Electrokinetic Flows: From Limitation to Design Opportunity. [PDF]

Micromachines (Basel)
Roy T.
europepmc   +1 more source

Recent Advances in MEMS Actuators for Microfluidic Applications: Emerging Designs, Multiphysics Modeling, and Performance Optimization. [PDF]

Micromachines (Basel)
Rahman O, Rahman MM, Akter O, Uddin MN, Rahman MS, Roy S, Sarker MS.   +6 more
europepmc   +1 more source

Hierarchical laser-programmed soft actuators for designing bionic robots with freeform morphing shapes. [PDF]

Sci Adv
Guo Y, Han M, Yang W, He M, Duan H, Ding X, Luo S.   +6 more
europepmc   +1 more source

Electrothermal Actuators for Portable Braille Devices

, 2016
The development of large-scale matrix-displays with raised pins in Braille con guration is a widely researched eld in academia and industry. Piezoelectric actuation principles can be used to manufacture such devices at high costs, but several other ...
Staab, Matthias, Nakic, Christian, Schlaak, Helmut F., Hatzfeld, Christian, El Khoury, Mario, Winterstein, Thomas   +5 more
core