Large-Area and Ultrathin MEMS Mirror Using Silicon Micro Rim [PDF]
Micromachines, 2021 A large-area and ultrathin MEMS (microelectromechanical system) mirror can provide efficient light-coupling, a large scanning area, and high energy efficiency for actuation.
Myeong-Su Ahn +2 more
exaly +5 more sources
Fast Synchronization Method of Comb-Actuated MEMS Mirror Pair for LiDAR Application [PDF]
Micromachines, 2021 MEMS-based LiDAR (micro-electro–mechanical system based light detection and ranging), with a low cost and small volume, becomes a promising solution for the two-dimensional (2D) and three-dimensional (3D) optical imaging. A semi-coaxial MEMS LiDAR design,
Dayong Qiao, Changfeng Xia, Xiumin Song
exaly +5 more sources
Scanning MEMS Mirror for High Definition and High Frame Rate Lissajous Patterns [PDF]
Micromachines, 2019 Scanning MEMS (micro-electro-mechanical system) mirrors are attractive given their potential use in a diverse array of laser scanning display and imaging applications. Here we report on an electrostatic MEMS mirror for high definition and high frame rate
Yeong-Hyeon Seo +2 more
exaly +5 more sources
An Electrothermal Cu/W Bimorph Tip-Tilt-Piston MEMS Mirror With High Reliability [PDF]
Micromachines, 2019 This paper presents the design, fabrication, and characterization of an electrothermal MEMS mirror with large tip, tilt and piston scan. This MEMS mirror is based on electrothermal bimorph actuation with Cu and W thin-film layers forming the bimorphs ...
Huikai Xie, Xiaoyang Zhang
exaly +4 more sources
A Fourier Transform Spectrometer Based on an Electrothermal MEMS Mirror with Improved Linear Scan Range [PDF]
Sensors, 2016 A Fourier transform spectrometer (FTS) that incorporates a closed-loop controlled, electrothermally actuated microelectromechanical systems (MEMS) micromirror is proposed and experimentally verified.
Wei Wang +3 more
doaj +3 more sources
Stability Study of an Electrothermally-Actuated MEMS Mirror with Al/SiO2 Bimorphs [PDF]
Micromachines, 2019 Electrothermal actuation is one of the main actuation mechanisms and has been employed to make scanning microelectromechanical systems (MEMS) mirrors with large scan range, high fill factor, and low driving voltage, but there exist long-term drifting ...
Peng Wang +5 more
doaj +2 more sources
Piezoelectric MEMS Mirror with Lissajous Scanning for Automobile Adaptive Laser Headlights [PDF]
Micromachines, 2022 The emergence of smart headlights with reconfigurable light distributions that provide optimal illumination, highlight road objects, and project symbols to communicate with traffic participants further enhances road safety.
Bin Xu, Yao Ji, Kai Liu, Jinhua Li
doaj +2 more sources
Sensors, 2017 The MEMS (Micro-Electronical Mechanical System) scanning mirror is an optical MEMS device that can scan laser beams across one or two dimensions. MEMS scanning mirrors can be applied in a variety of applications, such as laser display, bio-medical ...
Zheng You, Liangchen Ye, Gaofei Zhang
exaly +3 more sources
Water-Immersible MEMS Mirror with a Large Optical Aperture [PDF]
MicromachinesThis paper presents a two-axis AlScN-based water-immersible MEMS mirror fabricated in an 8-inch MEMS process. Compared with other studies, this device has a larger optical aperture 10 mm in diameter.
Yi Yang +7 more
doaj +2 more sources
Model-Based Angular Scan Error Correction of an Electrothermally-Actuated MEMS Mirror [PDF]
Sensors, 2015 In this paper, the actuation behavior of a two-axis electrothermal MEMS (Microelectromechanical Systems) mirror typically used in miniature optical scanning probes and optical switches is investigated.
Hao Zhang +5 more
doaj +2 more sources