Results 21 to 30 of about 307,394 (254)
AlScN Piezoelectric MEMS Mirrors With Large Field of View for LiDAR Application
Micromachines, 2022 This paper presents AlScN piezoelectric two-axis MEMS mirrors with gimbal-less and gimbaled designs fabricated in a CMOS-compatible manner. Integrated piezoelectric sensors provided feedback signals of the actual mirror positions.
Zhenyu Wu, Yichen Liu, Lihao Wang
exaly +3 more sources
Multiphysics & Parallel Kinematics Modeling of a 3DOF MEMS Mirror
MATEC Web of Conferences, 2015 This paper presents a modeling for a 3DoF electrothermal actuated micro-electro-mechanical (MEMS) mirror used to achieve scanning for optical coherence tomography (OCT) imaging.
Mamat N. +4 more
doaj +3 more sources
ProceedingsThis paper presents the optical system design for the MEMS mirror-based SPAD LiDAR system. The transmitter of the proposed LiDAR system consists of related optics for incident beam expansion and a piezoelectric MEMS mirror for a wide-scanning field of ...
Jeong-Yeon Hwang +5 more
doaj +2 more sources
High-Precision Optical Angle Detection Method for Two-Dimensional MEMS Mirrors [PDF]
MicromachinesAs a core component of MEMS LiDAR, the 2D MEMS mirror, with high-precision optical angle detection, is a key technology for radar scanning and imaging.
Longqi Ran +6 more
doaj +2 more sources
Biaxial Piezoelectrically Driven MEMS Mirror with Large Design Flexibility
ProceedingsIn this work, a biaxial, piezoelectrically driven resonant MEMS mirror with large design flexibility is presented. After FEM-based design optimization to reduce material stress and thereby maximize the achievable total optical scanning angles, fabricated
Lena Wysocki +7 more
doaj +2 more sources
Analysis of Error Sources in the Lissajous Scanning Trajectory Based on Two-Dimensional MEMS Mirrors
Photonics, 2023 Deviations or distortions in the trajectoy of MEMS-based Lissajous scanning imaging platforms might be detrimental to imaging quality. These deviations often arise from differences in MEMS mirror frequency response characteristics and asymmetry in ...
Xiulei Zhang +9 more
doaj +1 more source
Resonant biaxial 7-mm MEMS mirror for omnidirectional scanning
, 2022 Art. 011103, 12 S.Low-cost automotive laser scanners for environmental perception are needed to enable the integration of advanced driver assistant systems into all automotive vehicle segments, which is a key to reduce the number of traffic accidents on ...
Wagner, B. +11 more
core +2 more sources
A Silicon Optical Bench-Based Forward-View Two-Axis Scanner for Microendoscopy Applications
Micromachines, 2020 Optical microendoscopy enabled by a microelectromechanical system (MEMS) scanning mirror offers great potential for in vivo diagnosis of early cancer inside the human body. However, an additional beam folding mirror is needed for a MEMS mirror to perform
Dong Zheng +3 more
doaj +1 more source
MEMS Modulator-Based Mid-Infrared Laser Heterodyne Radiometer for Atmospheric Remote Sensing
Frontiers in Physics, 2022 The performance of a mid-infrared laser heterodyne radiometer (MIR-LHR) based on a micro-electro-mechanical system (MEMS) mirror is demonstrated in ground-based solar occultation mode.
Zhengyue Xue +11 more
doaj +1 more source
3D imaging using resonant large-aperture MEMS mirror arrays and laser distance measurement
, 2022 S.78-79We present a system concept for a scanning laser radar employing a newly developed MEMS mirror array. The array solution permits large reception apertures while preserving outstanding reliability, high scanning speed, compact size and small system
Hinkov, V. +7 more
core +1 more source