Results 11 to 20 of about 307,394 (254)
Nonlinear Dynamic Behavior of a Bi-Axial Torsional MEMS Mirror with Sidewall Electrodes [PDF]
Micromachines, 2016 Nonlinear dynamic responses of a Micro-Electro-Mechanical Systems (MEMS) mirror with sidewall electrodes are presented that are in close agreement with previously-reported experimental data.
Mehmet Ozdogan, Shahrzad Towfighian
doaj +4 more sources
Modeling and Implementation of Synchronization for Large-Aperture Electromagnetic MEMS Mirrors
MicromachinesMEMS-based LiDAR has showcased extensive application potential in the autonomous driving sector, attributed to its cost-effectiveness, compactness, and seamless integration capabilities.
Fahu Xu, Lingxiao Zhao
exaly +4 more sources
Resonant Varifocal Mems Mirror
2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS), 2022 This paper presents a novel varifocal mirror made of a micro-electromechanical system (MEMS) continuous deformable mirror (DM). It uses resonant electrostatic actuation (REA) via single voltage waveform to vary the focus of a 1.6 mm circular DM. Unlike traditional DMs, REA eliminates the need for individually addressable electrodes and the use of ...
Samed Kocer +12 more
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Actuators, 2022 A novel MEMS continuous deformable mirror (DM) is presented. The mirror can be integrated into optical systems to compensate for monochromatic and chromatic aberrations. It is comprised of a 1.6 mm circular plate supported by eight evenly spaced flexural
Amr Kamel +9 more
doaj +2 more sources
Dynamic Response Analysis of an Immersed Electrothermally Actuated MEMS Mirror
Actuators, 2023 MEMS mirrors have a wide range of applications, most of which require large field-of-view (FOV). Immersing MEMS mirrors in liquid is an effective way to improve the FOV.
Tailong Liu +4 more
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High Frequency MEMS Capacitive Mirror for Space Applications
Micromachines, 2023 Free space optics laser communication using modulating retroreflectors (MR) is a challenging application for an active mirror, due to the high frequencies (>100 kHz) required to enable sufficient data transfer.
Alvise Bagolini +5 more
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Recent progress in aluminum nitride for piezoelectric MEMS mirror applications: enhancements with scandium doping [PDF]
Microsystems & NanoengineeringPiezoelectric microelectromechanical systems (MEMS) mirrors enable precise and rapid beam steering with low power consumption, making them essential components in light detection and ranging (LiDAR) and advanced optical imaging systems.
Yohan Jung, Dongseok Lee, Jongbaeg Kim
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Parametric anti-phase excitation of resonant MEMS mirrors for fast start-up [PDF]
Scientific ReportsThis paper analyzes anti-phase parametric excitation for a resonant MEMS mirror by independently driving two out-of-plane electrostatic comb-drive actuators positioned at the left and right sides of the MEMS mirror, enabling a fast and reliable start-up ...
Fabian Reier +4 more
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Anticipating, measuring, and minimizing MEMS mirror scan error to improve laser scanning microscopy's speed and accuracy. [PDF]
PLoS ONE, 2017 We describe a method to speed up microelectromechanical system (MEMS) mirror scanning by > 20x, while also improving scan accuracy. We use Landweber deconvolution to determine an input voltage which would produce a desired output, based on the measured ...
John P Giannini +2 more
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A Fast, Large-Stroke Electrothermal MEMS Mirror Based on Cu/W Bimorph
Micromachines, 2015 This paper reports a large-range electrothermal bimorph microelectromechanical systems (MEMS) mirror with fast thermal response. The actuator of the MEMS mirror is made of three segments of Cu/W bimorphs for lateral shift cancelation and two segments of ...
Huikai Xie, Xiaoyang Zhang
exaly +3 more sources