5 V Compatible Two-Axis PZT Driven MEMS Scanning Mirror with Mechanical Leverage Structure for Miniature LiDAR Application [PDF]
Sensors, 2017 The MEMS (Micro-Electronical Mechanical System) scanning mirror is an optical MEMS device that can scan laser beams across one or two dimensions. MEMS scanning mirrors can be applied in a variety of applications, such as laser display, bio-medical ...
Liangchen Ye, Gaofei Zhang, Zheng You
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Modeling and Optimization of a Novel ScAlN-Based MEMS Scanning Mirror with Large Static and Dynamic Two-Axis Tilting Angles [PDF]
Sensors, 2021 The piezoelectric MEMS (micro-electro-mechanical systems) scanning mirrors are in a great demand for numerous optoelectronic applications. However, the existing actuation strategies are severely limited for poor compatibility with CMOS process, non ...
Changhe Sun +6 more
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Scanning MEMS Mirror for High Definition and High Frame Rate Lissajous Patterns
Micromachines, 2019 Scanning MEMS (micro-electro-mechanical system) mirrors are attractive given their potential use in a diverse array of laser scanning display and imaging applications. Here we report on an electrostatic MEMS mirror for high definition and high frame rate
Yeong-Hyeon Seo +3 more
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Development of an Electrostatic Comb-Driven MEMS Scanning Mirror for Two-Dimensional Raster Scanning [PDF]
Micromachines, 2021 Microelectromechanical System (MEMS)-based scanning mirrors are important optical devices that have been employed in many fields as a low-cost and miniaturized solution.
Qiang Wang +4 more
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The Design and Performance Evaluation of an Eye-Tracking System Based on an Electrostatic MEMS Scanning Mirror [PDF]
MicromachinesIn this paper, we proposed an eye-tracking system featuring a small size and high scanning frequency, utilizing an electrostatic biaxial scanning mirror fabricated through a micro-electro-mechanical system (MEMS) process.
Minqiang Li +8 more
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Analysis of Error Sources in the Lissajous Scanning Trajectory Based on Two-Dimensional MEMS Mirrors
Photonics, 2023 Deviations or distortions in the trajectoy of MEMS-based Lissajous scanning imaging platforms might be detrimental to imaging quality. These deviations often arise from differences in MEMS mirror frequency response characteristics and asymmetry in ...
Xiulei Zhang +9 more
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Scanning Mirror Benchmarking Platform Based on Two-Dimensional Position Sensitive Detector and Its Accuracy Analysis [PDF]
MicromachinesA MEMS scanning mirror is a beam scanning device based on MEMS technology, which plays an important role in the fields of Lidar, medical imaging, laser projection display, and so on.
Hexiang Guo, Junya Wang, Zheng You
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High-Precision Optical Angle Detection Method for Two-Dimensional MEMS Mirrors [PDF]
MicromachinesAs a core component of MEMS LiDAR, the 2D MEMS mirror, with high-precision optical angle detection, is a key technology for radar scanning and imaging.
Longqi Ran +6 more
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Optimizing fatigue resistance and lifetime of MEMS scanning mirrors with a novel coupled parameter distribution structural framework [PDF]
Microsystems & NanoengineeringWe present a coupled parameter distribution structural optimization framework that enhances the fatigue resistance and extends the lifetime of micro-electro-mechanical systems (MEMS) scanning mirrors.
Songtao Liu +3 more
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MEMS Mirrors for LiDAR: A Review
Micromachines, 2020 In recent years, Light Detection and Ranging (LiDAR) has been drawing extensive attention both in academia and industry because of the increasing demand for autonomous vehicles. LiDAR is believed to be the crucial sensor for autonomous driving and flying,
Dingkang Wang +2 more
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