5 V Compatible Two-Axis PZT Driven MEMS Scanning Mirror with Mechanical Leverage Structure for Miniature LiDAR Application [PDF]
Sensors, 2017 The MEMS (Micro-Electronical Mechanical System) scanning mirror is an optical MEMS device that can scan laser beams across one or two dimensions. MEMS scanning mirrors can be applied in a variety of applications, such as laser display, bio-medical ...
Liangchen Ye, Gaofei Zhang, Zheng You
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Multiple Laser Stripe Scanning Profilometry Based on Microelectromechanical Systems Scanning Mirror Projection [PDF]
Micromachines, 2019 In traditional laser-based 3D measurement technology, the width of the laser stripe is uncontrollable and uneven. In addition, speckle noise in the image and the noise caused by mechanical movement may reduce the accuracy of the scanning results.
Gailing Hu +5 more
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Scanning MEMS Mirror for High Definition and High Frame Rate Lissajous Patterns
Micromachines, 2019 Scanning MEMS (micro-electro-mechanical system) mirrors are attractive given their potential use in a diverse array of laser scanning display and imaging applications. Here we report on an electrostatic MEMS mirror for high definition and high frame rate
Yeong-Hyeon Seo +3 more
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Development of an Electrostatic Comb-Driven MEMS Scanning Mirror for Two-Dimensional Raster Scanning [PDF]
Micromachines, 2021 Microelectromechanical System (MEMS)-based scanning mirrors are important optical devices that have been employed in many fields as a low-cost and miniaturized solution.
Qiang Wang +4 more
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Scanning Mirror Benchmarking Platform Based on Two-Dimensional Position Sensitive Detector and Its Accuracy Analysis [PDF]
MicromachinesA MEMS scanning mirror is a beam scanning device based on MEMS technology, which plays an important role in the fields of Lidar, medical imaging, laser projection display, and so on.
Hexiang Guo, Junya Wang, Zheng You
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Analysis of Internal Angle Error of UAV LiDAR Based on Rotating Mirror Scanning
Remote Sensing, 2022 UAV LiDAR is a powerful tool for rapidly acquiring ground-based 3D spatial information and has been used in various applications. In addition to the ranging mechanism, the scanning method is also an important factor, affecting the performance of UAV ...
Hao Zhou +4 more
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Miniaturized Optical Resolution Photoacoustic Microscope Based on a Microelectromechanical Systems Scanning Mirror [PDF]
Micromachines, 2018 In this paper, we report a miniaturized optical resolution photoacoustic microscopy system based on a microelectromechanical system (MEMS) scanning mirror.
Weizhi Qi +4 more
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A Two-Dimensional Laser Scanning Mirror Using Motion-Decoupling Electromagnetic Actuators [PDF]
Sensors, 2013 This work proposes a two-dimensional (2-D) laser scanning mirror with a novel actuating structure composed of one magnet and two coils. The mirror-actuating device generates decoupled scanning motions about two orthogonal axes by combining two ...
Dongho Oh, Bu Hyun Shin, Seung-Yop Lee
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Improving Angular Accuracy of a Scanning Mirror Based on Error Modeling and Correction [PDF]
Sensors, 2019 Scanning mirrors appear to be key components in optoelectronic systems for line-of-sight (LOS) stabilization. For improving the angular accuracy of a scanning mirror based on the eddy current displacement sensor measurement, an angular error-correction ...
Yue Fan +5 more
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The Design and Performance Evaluation of an Eye-Tracking System Based on an Electrostatic MEMS Scanning Mirror [PDF]
MicromachinesIn this paper, we proposed an eye-tracking system featuring a small size and high scanning frequency, utilizing an electrostatic biaxial scanning mirror fabricated through a micro-electro-mechanical system (MEMS) process.
Minqiang Li +8 more
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