Large-Aperture kHz Operating Frequency Ti-Alloy Based Optical Micro Scanning Mirror for LiDAR Application [PDF]
Micromachines, 2017 A micro scanning mirror is an optical device used to scan laser beams which can be used for Light Detection and Ranging (LiDAR) in applications like unmanned driving or Unmanned Aerial Vehicle (UAV).
Zheng You, Liangchen Ye, Gaofei Zhang
exaly +4 more sources
A Large-Size MEMS Scanning Mirror for Speckle Reduction Application † [PDF]
Micromachines (Basel), 2017 Based on the micro electronic mechanical system (MEMS) processing, a large size 2-D scanning mirror driven by electromagnetic force was designed and implemented in this paper.
Li F +5 more
europepmc +3 more sources
Study on a Two-Dimensional Scanning Micro-Mirror and Its Application in a MOEMS Target Detector
Sensors, 2010 A two-dimensional (2D) scanning micro-mirror for target detection and measurement has been developed. This new micro-mirror is used in a MOEMS target detector to replace the conventional scanning detector.
Hu Huang +3 more
doaj +3 more sources
Modeling of MOEMS electromagnetic scanning grating mirror for NIR micro-spectrometer
AIP Advances, 2016 In this paper, the mathematical model is developed for researching the detailed electromagnetic mechanism of MOEMS scanning mirror. We present the relationship between spectral range and optical scanning angle.
Ying Zhou +3 more
doaj +2 more sources
Active-Feedback 3D Single-Molecule Tracking Using a Fast-Responding Galvo Scanning Mirror. [PDF]
J Phys Chem A, 2023 Real-time three-dimensional single-particle tracking (RT-3D-SPT) allows continuous detection of individual freely diffusing objects with high spatiotemporal precision by applying closed-loop active feedback in an optical microscope.
Tan X +5 more
europepmc +2 more sources
Modeling and Optimization of a Novel ScAlN-Based MEMS Scanning Mirror with Large Static and Dynamic Two-Axis Tilting Angles. [PDF]
Sensors (Basel), 2021 The piezoelectric MEMS (micro-electro-mechanical systems) scanning mirrors are in a great demand for numerous optoelectronic applications. However, the existing actuation strategies are severely limited for poor compatibility with CMOS process, non ...
Sun C +6 more
europepmc +2 more sources
Nonlinearity investigation of the MEMS scanning mirror with electrostatic comb drive
IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 2014 In this work, we systematically investigate the nonlinear phenomenon of an electrostatic comb driven micro scanning mirror. The system governing equation is illustrated by Mathieu equation.
Pei-Gang Deng, Wei Ma
semanticscholar +2 more sources
Low voltage operation electrostatic comb drive micro-mirror for laser scanning display [PDF]
Vietnam Journal of Mechanics, 2012 Electrostatic comb drive micro-mirror has limitation of high operation voltage, which has limited its practice use. Recent developments in decreasing operation voltage are promising for mobile micro-mirror. Especially, the operation voltage is decreased
Hoang Manh Chu +2 more
doaj +2 more sources
Scanning Micro-Mirror with an Electrostatic Spring for Compensation of Hard-Spring Nonlinearity
Micromachines, 2017 A scanning micro-mirror operated at the mechanical resonant frequency often suffer nonlinearity of the torsion-bar spring. The torsion-bar spring becomes harder than the linear spring with the increase of the rotation angle (hard-spring effect). The hard-
Takashi Izawa +2 more
doaj +2 more sources
A novel continuously variable angular vertical comb-drive with application in scanning micromirror [PDF]
, 2013 An angular vertical comb-drive (AVC) with electrically controllable initial comb-offset is presented in the context of a single crystalline silicon scanning micromirror.
Lì, Lì L. +3 more
core +4 more sources