Low Power Compact 3D-Constructed AlScN Piezoelectric MEMS Mirrors for Various Scanning Strategies
Micromachines, 2023 In this paper, the newly developed 3D-constructed AlScN piezoelectric MEMS mirror is presented. This paper describes the structure and driving mechanism of the proposed mirror device, covering its driving characteristics in both quasi-static and resonant
Jeong-Yeon Hwang +6 more
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Resolution adjustable Lissajous scanning with piezoelectric MEMS mirrors
Optics Express, 2023 We previously designed a dual-axis piezoelectric MEMS mirror with a low crosstalk gimbal structure, which is utilized as the key device for further research for laser beam scanning. This paper mainly focuses on studying the Lissajous scanning resolution of this MEMS mirror with frequency ratio and phase modulation.
Yuyao Zhang +8 more
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Photoacoustic imaging based on MEMS mirror scanning [PDF]
Biomedical Optics Express, 2010 A microelectromechanical systems (MEMS)-based photoacoustic imaging system is reported for the first time. In this system, the MEMS-based light scanning subsystem and a ring-shaped polyvinylidene fluoride (PVDF) transducer are integrated into a miniaturized probe that is capable of three-dimensional (3D) photoacoustic imaging.
Xi, Lei +5 more
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MEMS Scanning Mirrors for Optical Coherence Tomography [PDF]
Photonics, 2020 This contribution presents an overview of advances in scanning micromirrors based on MEMS (Micro-electro-mechanical systems) technologies to achieve beam scanning for OCT (Optical Coherence Tomography). The use of MEMS scanners for miniaturized OCT probes requires appropriate optical architectures.
Christophe Gorecki, Sylwester Bargiel
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A Silicon Optical Bench-Based Forward-View Two-Axis Scanner for Microendoscopy Applications
Micromachines, 2020 Optical microendoscopy enabled by a microelectromechanical system (MEMS) scanning mirror offers great potential for in vivo diagnosis of early cancer inside the human body. However, an additional beam folding mirror is needed for a MEMS mirror to perform
Dong Zheng +3 more
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Wide-field fast-scanning photoacoustic microscopy based on a water-immersible MEMS scanning mirror. [PDF]
J Biomed Opt, 2012 By offering images with high spatial resolution and unique optical absorption contrast, optical-resolution photoacoustic microscopy (OR-PAM) has gained increasing attention in biomedical research.
Yao J +7 more
europepmc +2 more sources
Improved sampling scheme for LiDAR in Lissajous scanning mode
Microsystems & Nanoengineering, 2022 MEMS light detection and ranging (LiDAR) is becoming an indispensable sensor in vehicle environment sensing systems due to its low cost and high performance.
Junya Wang, Gaofei Zhang, Zheng You
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Anticipating, measuring, and minimizing MEMS mirror scan error to improve laser scanning microscopy's speed and accuracy. [PDF]
PLoS ONE, 2017 We describe a method to speed up microelectromechanical system (MEMS) mirror scanning by > 20x, while also improving scan accuracy. We use Landweber deconvolution to determine an input voltage which would produce a desired output, based on the measured ...
John P Giannini +2 more
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Large-Area and Ultrathin MEMS Mirror Using Silicon Micro Rim
Micromachines, 2021 A large-area and ultrathin MEMS (microelectromechanical system) mirror can provide efficient light-coupling, a large scanning area, and high energy efficiency for actuation.
Myeong-Su Ahn +3 more
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3D imaging using resonant large-aperture MEMS mirror arrays and laser distance measurement
, 2022 S.78-79We present a system concept for a scanning laser radar employing a newly developed MEMS mirror array. The array solution permits large reception apertures while preserving outstanding reliability, high scanning speed, compact size and small system
Hinkov, V. +7 more
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