Results 11 to 20 of about 1,249,343 (219)
A Large-Size MEMS Scanning Mirror for Speckle Reduction Application † [PDF]
Micromachines (Basel), 2017 Based on microelectronic mechanical system (MEMS) processing, a large-size 2-D scanning mirror (6.5 mm in diameter) driven by electromagnetic force was designed and implemented in this paper. We fabricated the micromirror with a silicon wafer and selectively electroplated Ni film on the back of the mirror. The nickel film was magnetized in the magnetic
Li F +5 more
europepmc +4 more sources
Optical imaging with scanning MEMS mirror - A single photodetector approach
2009 16th IEEE International Conference on Image Processing (ICIP), 2009 This paper describes an optical system for low-complexity optical image acquisition based on a single scanning MEMS mirror and a single photodetector. The overall aim of the research is to investigate techniques for image acquisition at electromagnetic wavelengths where the cost and/or technical maturity of detector arrays pose a limitation.
Li Li 0028 +6 more
core +9 more sources
Micromachines, 2019 In traditional laser-based 3D measurement technology, the width of the laser stripe is uncontrollable and uneven. In addition, speckle noise in the image and the noise caused by mechanical movement may reduce the accuracy of the scanning results.
Gailing Hu +5 more
doaj +2 more sources
Nonlinearity investigation of the MEMS scanning mirror with electrostatic comb drive
The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS), 2014 In this work, we systematically investigate the nonlinear phenomenon of an electrostatic comb driven micro scanning mirror. The system governing equation is illustrated by Mathieu equation. A numerical model is built in MatLab based on the governing equation. The scanning mirror response in both time and frequency domain is simulated.
Peigang Deng, Wei Ma
openaire +2 more sources
ProceedingsThis paper presents the optical system design for the MEMS mirror-based SPAD LiDAR system. The transmitter of the proposed LiDAR system consists of related optics for incident beam expansion and a piezoelectric MEMS mirror for a wide-scanning field of ...
Jeong-Yeon Hwang +5 more
doaj +2 more sources
Fabrication of mems devices – a scanning micro mirror case study
TecnoLógicas, 2017 This paper presents the working principle, design, and fabrication of a silicon-based scanning micromirror with a new type of action mechanism as an example of MEMS (Micro-Electro-Mechanical Systems).
Artur Zarzycki +3 more
doaj +4 more sources
A novel continuously variable angular vertical comb-drive with application in scanning micromirror [PDF]
, 2013 An angular vertical comb-drive (AVC) with electrically controllable initial comb-offset is presented in the context of a single crystalline silicon scanning micromirror.
Lì, Lì L. +3 more
core +4 more sources
A MEMS Mirror-Based Confocal Laser Endomicroscope with Image Distortion Correction
IEEE Photonics Journal, 2023 Scanning MEMS mirrors can extend confocal laser microscopy into endoscopic applications, but the practical use of MEMS mirror-based confocal endomicroscopy is hindered partially by various image distortions such as barrel, fan-shaped and nonlinear ...
Teng Pan +6 more
doaj +1 more source
Cold-atom shaping with MEMS scanning mirrors
Optics Letters, 2022 We demonstrate the integration of micro-electro-mechanical-systems (MEMS) scanning mirrors as active elements for the local optical pumping of ultra-cold atoms in a magneto-optical trap. A pair of MEMS mirrors steer a focused resonant beam through a cloud of trapped atoms shelved in the F
Bregazzi, Alan +8 more
openaire +5 more sources
Resonant biaxial 7-mm MEMS mirror for omnidirectional scanning
, 2022 Art. 011103, 12 S.Low-cost automotive laser scanners for environmental perception are needed to enable the integration of advanced driver assistant systems into all automotive vehicle segments, which is a key to reduce the number of traffic accidents on ...
Wagner, B. +11 more
core +2 more sources