Results 31 to 40 of about 1,249,343 (219)
Design Study of a Large-Angle Optical Scanning System for MEMS LIDAR
Applied Sciences, 2022 MEMS-based LIDAR has the advantages of fast-scanning, simple structure, small volume, and light weight, which make it a hot topic for 3D imaging. In order to overcome the limited scanning angle of the current MEMS mirrors, a large angle MEMS-based ...
Yajun Pang +4 more
doaj +1 more source
Biaxial resonant 7mm-MEMS mirror for automotive LIDAR application
, 2022 S.150-151A resonant biaxial comb-actuated 7mm-MEMS scanning mirror with tripod-suspension is developed to provide omnidirectional scanning in an automotive time-of-flight LIDAR sensor application.
Hofmann, U. +5 more
core +1 more source
An Electrothermal Cu/W Bimorph Tip-Tilt-Piston MEMS Mirror with High Reliability
Micromachines, 2019 This paper presents the design, fabrication, and characterization of an electrothermal MEMS mirror with large tip, tilt and piston scan. This MEMS mirror is based on electrothermal bimorph actuation with Cu and W thin-film layers forming the bimorphs ...
Liang Zhou, Xiaoyang Zhang, Huikai Xie
doaj +1 more source
Piezoelectric MEMS Mirror with Lissajous Scanning for Automobile Adaptive Laser Headlights
Micromachines, 2022 The emergence of smart headlights with reconfigurable light distributions that provide optimal illumination, highlight road objects, and project symbols to communicate with traffic participants further enhances road safety.
Bin Xu, Yao Ji, Kai Liu, Jinhua Li
doaj +1 more source
Miniaturisation of Photoacoustic Sensing Systems Using MEMS Transducer Arrays and MEMS Scanning Mirrors [PDF]
2018 IEEE SENSORS, 2018 A custom-built thin film aluminium nitride MEMS ultrasound transducer and its application to photoacoustic sensing is presented. The photoacoustic signal is generated using a commercial Nd:YAG laser and, for the first time, using a high pulse repetition rate MEMS Q-switched Nd:YAG laser.
Kusch, Jonas +3 more
openaire +4 more sources
EndoTac: An Endoscopic Camera-Based Tactile Sensor with High Sensitivity for Minimally Invasive Surgery. [PDF]
Adv Sci (Weinh)EndoTac presents a trocar‐compatible endoscopic vision‐based tactile sensor that uses a convex mirror to enlarge side‐facing tactile coverage during minimally invasive vessel palpation. Distorted tactile images are unwarped and processed by a learning model to estimate vascular deformation, enabling sensitive, spatially distributed tactile perception ...
Wang Y +5 more
europepmc +2 more sources
Model-Based Angular Scan Error Correction of an Electrothermally-Actuated MEMS Mirror
Sensors, 2015 In this paper, the actuation behavior of a two-axis electrothermal MEMS (Microelectromechanical Systems) mirror typically used in miniature optical scanning probes and optical switches is investigated.
Hao Zhang +5 more
doaj +1 more source
Micromachines, 2022 MEMS-based LiDAR with a low cost and small volume is a promising solution for 3D measurement. In this paper, a reconfigurable angular resolution design method is proposed in a separate-axis Lissajous scanning MEMS LiDAR system. This design method reveals
Fahu Xu +6 more
doaj +1 more source
Scientific Reports, 2022 Optical resolution photoacoustic microscopy (OR-PAM) is a remarkable biomedical imaging technique that can selectively visualize microtissues with optical-dependent high resolution.
Ryo Shintate +5 more
doaj +1 more source
Fast piezoelectric scanning MEMS mirror for 1D ion addressing [PDF]
2019 International Conference on Optical MEMS and Nanophotonics (OMN), 2019 We present a small-scale piezoelectric MEMS micromirror, with resonant frequencies above 300 kHz for 1D scanning. The device is intended for higher frequency operation by reducing the scale of existing designs, and was fabricated using a multi-user silicon-on-insulator process.
Janin, Paul +4 more
openaire +2 more sources