MEMS Micromirror Actuation Techniques: A Comprehensive Review of Trends, Innovations, and Future Prospects. [PDF]
Ahmad M, Bahri M, Sawan M.
europepmc +1 more source
High speed biaxial piezoelectric MEMS micromirror with varifocal tunability. [PDF]
Shillingburg H, Lopez D.
europepmc +1 more source
Soft Skins With Reversible Thickness Morphing: Materials, Mechanisms, and Applications. [PDF]
Ozioko O, Akah C, Dahiya R.
europepmc +1 more source
A review on conductive polymeric nanocomposites for advanced electromagnetic interference shielding: materials, mechanisms, and applications. [PDF]
Fallah A +4 more
europepmc +1 more source
CMOS Electrokinetic Systems and Fabrication Approaches for On-CMOS 3D Electrodes. [PDF]
Keeble L.
europepmc +1 more source
Piezoresistive Cantilever Microprobe with Integrated Actuator for Contact Resonance Imaging. [PDF]
Ma T, Fahrbach M, Peiner E.
europepmc +1 more source
Bidirectional Electrothermal Actuator With Z-Shaped Beams
A bidirectional micro-actuator powered by electrothermal force is successfully demonstrated under both dc and ac operations, without the assistance of magnetic field, using MetalMUMPs process.
Yong Zhu +2 more
exaly +2 more sources
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Recent Progress of Soft Electrothermal Actuators
Soft Robotics, 2021Developing soft electrothermal actuators (ETAs) has drawn extensive concern in recent years. This article presents a comprehensive review on recent progress of soft ETAs through five sections: device design on structure and materials, property, fabrication methods, applications, and prospects. It's found that the fabrication process can be divided into
Yu-Tao Li
exaly +3 more sources
Review of Electrothermal Actuators and Applications [PDF]
This paper presents a review of electrothermal micro-actuators and applications. Electrothermal micro-actuators have been a significant research interest over the last two decades, and many different designs and applications have been investigated.
Changhai Wang, Alissa Potekhina
exaly +3 more sources

