Results 171 to 180 of about 1,012 (213)

Electrothermally actuated inline microfluidic valve

Sensors and Actuators A: Physical, 2003
A normally open electrothermally actuated inline microvalve that has been developed, fabricated and tested with liquids is presented. These actuators use high volumetric expansion of a sealed patch of Paraffin heated above its melting point, providing large displacements and forces while using low power. The inline valve is surface micromachined on top
P Selvaganapathy, E.T Carlen, C.H Mastrangelo   +2 more
openaire   +1 more source

CMOS–MEMS Lateral Electrothermal Actuators

Journal of Microelectromechanical Systems, 2008
In this paper, a type of lateral electrothermal (ET) actuator fabricated with post-CMOS micromachining is presented. The actuator is a beam with a multimorph structure, composed of CMOS dielectric and metal interconnect. Following structural release, the actuators demonstrate self-assembly under the moments arising from residual stress.
P.J. Gilgunn, null Jingwei Liu, N. Sarkar, G.K. Fedder   +3 more
openaire   +1 more source

Electrothermally actuated MEMS terahertz metamaterial

2014 International Conference on Optical MEMS and Nanophotonics, 2014
We present the design, simulation, fabrication and characterization of a continuously tunable Omega-ring teratahertz metamaterial. The tunability of metamaterial is obtained by integrating electrothermal actuator where higher tuning range, larger stroke and enhanced repeatability are possible.
null ChongPei Ho, Prakash Pitchappa, null Yu-Sheng Lin, null Chengkuo Lee   +3 more
openaire   +1 more source

The design and analysis of a MEMS electrothermal actuator

Journal of Semiconductors, 2015
This paper introduces a type of out-of-plane microelectrothermal actuator, which is based on the principle of bimetal film thermal expansion in the fuse. A polymer SU-8 material and nickel are used as the functional and structural materials of the actuator. Through heating the resistance wire using electricity, the actuator produces out-of-plane motion
Suocheng Wang, Yongping Hao, Shuangjie Liu   +2 more
openaire   +1 more source

SiC cantilever resonators with electrothermal actuation

Sensors and Actuators A: Physical, 2006
Abstract Cubic SiC cantilever resonators designed for electrothermal actuation are presented. Metal electrodes with both open circuit and short circuit designs have been deposited and patterned on top of the 3C–SiC cantilevers. Pt electrodes on single crystal 3C–SiC cantilevers and NiCr electrodes on poly-crystalline 3C–SiC cantilevers have both been
Jiang L, Cheung R, Hedley J, Hassan M, Harris AJ, Burdess JS, Mehregany M, Zorman CA   +7 more
openaire   +2 more sources

Repeatability study of an electrothermally actuated micromirror

2009 IEEE International Reliability Physics Symposium, 2009
With their large scan range and low drive voltages, electrothermally-actuated micromirrors have great potential in optical biomedical imaging applications, but the repeatability and reliability of such micromirrors are not well understood. This paper reports the conditions for achieving repeatability of the embedded resistive heater and the mirror tilt
Sagnik Pal, Huikai Xie
openaire   +1 more source

Electrothermally actuated large displacement waveguides

2013 International Conference on Optical MEMS and Nanophotonics (OMN), 2013
A waveguide structure is designed and fabricated to provide a path for propagating light from device substrate to a movable mirror plate. The device is constructed with three pairs of electrothermal actuators that enable vertical motion with ultralow lateral shift.
Sean R. Samuelson, Huikai Xie
openaire   +1 more source

Performance Comparison of Typical Electrothermal Actuators

Key Engineering Materials, 2013
As the power producer, the micro actuator is an important part of the micro electro- mechanical system, which is used as the conversion of energy, motion and force producing. In this paper, the mechanical models of three bent beam electrothermal actuators are summarized to make comparison with each other and analyze mechanical performance. For Π-shaped
Ling Zhou, Xue Jin Shen, Zhen Lu Wang, Yi Hu   +3 more
openaire   +1 more source

Bi-directional electrothermal electromagnetic actuators

Journal of Micromechanics and Microengineering, 2007
A new breed of in-plane bi-directional MEMS actuators based on controlled electrothermal buckling and electromagnetic Lorentz force has been demonstrated under both dc and ac operations. Experimentally, bi-directional actuators made by the standard surface-micromachining process have a lateral actuation range of several microns and can exert forces ...
Andrew Cao, Jongbaeg Kim, Liwei Lin
openaire   +1 more source

A MEMS VOA Using Electrothermal Actuators

Journal of Lightwave Technology, 2007
A comprehensive study of electrothermally driven microelectromechanical system (MEMS) variable optical attenuator (VOA) devices using an H-shaped structure is presented in this paper. Based on its unique structural design, a retroreflection-type VOA of smaller footprint is realized.
openaire   +1 more source