Results 171 to 180 of about 116,914 (208)
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Electrothermally actuated large displacement waveguides
2013 International Conference on Optical MEMS and Nanophotonics (OMN), 2013A waveguide structure is designed and fabricated to provide a path for propagating light from device substrate to a movable mirror plate. The device is constructed with three pairs of electrothermal actuators that enable vertical motion with ultralow lateral shift.
Sean R. Samuelson, Huikai Xie
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A micromachined RF microrelay with electrothermal actuation
Sensors and Actuators A: Physical, 2003Abstract This paper reports the design and fabrication of a low-voltage lateral-contact microrelay for RF applications. The silicon surface micromachined relay utilizes electrothermal actuators and low-stress silicon nitride as a structural connection as well as electrical and thermal isolation. The sidewall contact is sputtered gold.
Tien, NC, Li, Z, McCormick, DT, Wang, Y
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Bi-directional electrothermal electromagnetic actuators
Journal of Micromechanics and Microengineering, 2007A new breed of in-plane bi-directional MEMS actuators based on controlled electrothermal buckling and electromagnetic Lorentz force has been demonstrated under both dc and ac operations. Experimentally, bi-directional actuators made by the standard surface-micromachining process have a lateral actuation range of several microns and can exert forces ...
Andrew Cao, Jongbaeg Kim, Liwei Lin
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Modelling Surface-Micromachined Electrothermal Actuators
Canadian Journal of Electrical and Computer Engineering, 2004A method for the accurate simulation of electrothermal actuators is presented. The model accounts for variations in material parameters that occur over the temperature range at which polysilicon electrothermal actuators are operated. The paper then presents the steps necessary to perform a sequential electrothermal-mechanical analysis using ANSYS ...
M Parameswaran
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Electrothermally actuated inline microfluidic valve
Sensors and Actuators A: Physical, 2003A normally open electrothermally actuated inline microvalve that has been developed, fabricated and tested with liquids is presented. These actuators use high volumetric expansion of a sealed patch of Paraffin heated above its melting point, providing large displacements and forces while using low power. The inline valve is surface micromachined on top
P Selvaganapathy +2 more
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Compliant MicroTransmissions for Rectilinear Electrothermal Actuators
2001This paper reports on synthesized designs of compliant microstructures used to modify the force-displacement relationships of electrothermal actuators. The design process uses truss elements and involves topology synthesis and dimensional optimization in a two-stage approach.
Larry L. Chu +2 more
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A bimorph electrothermal actuator for micromirror devices
SPIE Proceedings, 2015The research and development results along the characteristics of the micro-mirror element driven by thermal microactuator are presented. This work shows that for calculating micro-mirror element deflection is crucial for consideration the temperature distribution along the length of the micromirror element. The calculation of the superheat temperature
Sergey S. Evstafyev +4 more
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Development of X-beam electrothermal actuators
Microsystem Technologies, 2005A new electrothermal actuator with X-shaped single crystal silicon beam structure is proposed and characterized. This new actuator is made by using SOI-DRIE processes. X-beam actuator of 2000 μm projection length and 0.5° tilted angle can generate 90 μm static displacement. This new design shows a better static displacement and stability in long travel
Chengkuo Lee, J. Andrew. Yeh
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Sub-micron metallic electrothermal actuators
Journal of Micromechanics and Microengineering, 2004The scaling down of electromechanical devices from micrometer scales to nano scales is of great interest. This paper presents fabrication and characterization of sub-micron high aspect ratio metallic electrothermal actuators using a combination of electron beam lithography and electroplating techniques.
Lee, JS +4 more
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Out-of-plane electrothermally actuated bistable buckled microbridge actuator
IEEE Sensors, 2005., 2005In this paper, we report the design, simulation, and fabrication of a novel electro-thermally actuated buckled micro-bridge for out of plane-actuation. The new structure consists of a beam supported by four springs and four 'legs' at the supporting ends.
A. Michael +3 more
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