Results 161 to 170 of about 1,012 (213)

Electrically Driven Liquid Crystal Elastomer Self-Oscillators via Rheostat Feedback Mechanism. [PDF]

Polymers (Basel)
Li K, Li Z, Zhou L.
europepmc   +1 more source

Modeling of Beam Electrothermal Actuators

Journal of Microelectromechanical Systems, 2020
Beam electrothermal actuators amplify the thermal expansion of pre-shaped beams and use the symmetrical structure to create a linear motion. These actuators, including V and Z shapes, are widely used in microsystems. Explicit analytical expressions are derived in this paper governing the structural deformation of these actuators due to electrothermal ...
Hussein Hussein, Hossein Fariborzi, Mohammad I. Younis   +2 more
openaire   +3 more sources

A micromachined RF microrelay with electrothermal actuation

Sensors and Actuators A: Physical, 2003
Abstract This paper reports the design and fabrication of a low-voltage lateral-contact microrelay for RF applications. The silicon surface micromachined relay utilizes electrothermal actuators and low-stress silicon nitride as a structural connection as well as electrical and thermal isolation. The sidewall contact is sputtered gold.
Tien, NC, Li, Z, McCormick, DT, Wang, Y
openaire   +3 more sources

Sub-micron metallic electrothermal actuators

Journal of Micromechanics and Microengineering, 2004
The scaling down of electromechanical devices from micrometer scales to nano scales is of great interest. This paper presents fabrication and characterization of sub-micron high aspect ratio metallic electrothermal actuators using a combination of electron beam lithography and electroplating techniques.
Lee, JS, Park, DSW, Nallani, AK, Lee, GS, Lee, JB   +4 more
openaire   +3 more sources

Development of X-beam electrothermal actuators

Microsystem Technologies, 2005
A new electrothermal actuator with X-shaped single crystal silicon beam structure is proposed and characterized. This new actuator is made by using SOI-DRIE processes. X-beam actuator of 2000 μm projection length and 0.5° tilted angle can generate 90 μm static displacement. This new design shows a better static displacement and stability in long travel
Chengkuo Lee, J. Andrew. Yeh
openaire   +2 more sources

Bidirectional Electrothermal Actuator With Z-Shaped Beams

IEEE Sensors Journal, 2012
A bidirectional micro-actuator powered by electrothermal force is successfully demonstrated under both dc and ac operations, without the assistance of magnetic field, using MetalMUMPs process.
Yong Zhu, S O Reza Moheimani, Mehmet Rasit Yüce   +2 more
exaly   +2 more sources

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Recent Progress of Soft Electrothermal Actuators

Soft Robotics, 2021
Developing soft electrothermal actuators (ETAs) has drawn extensive concern in recent years. This article presents a comprehensive review on recent progress of soft ETAs through five sections: device design on structure and materials, property, fabrication methods, applications, and prospects. It's found that the fabrication process can be divided into
Ye, Tian, Yu-Tao, Li, He, Tian, Yi, Yang, Tian-Ling, Ren   +4 more
openaire   +2 more sources

Fabrication of an Electrothermally Actuated Electrostatic Microgripper

International Journal of Nonlinear Sciences and Numerical Simulation, 2002
A novel electrostatic microgripper, which can handle micro objects with the electrostatic force, is designed and fabricated. It consists of gripping part with one inner and two outer electrodes, and releasing part with an electrothermal actuator. It grips micro objects using electric field generated between the electrodes, and releases them using the ...
Lee, S.H., Lee, K.-C., Lee, S.S. Lee, Seung Seob, Oh, H.-S.   +3 more
openaire   +1 more source

Scaling of folded electrothermal actuators

2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS), 2010
Scaling of folded electrothermal actuators for optical applications in arrays from 1 mm to 50 µm pitch is presented. A 1-D model of a folded electrothermal actuator is presented to demonstrate the inverse scaling law for power with array pitch and linear scaling for rotational scan range. Metal/oxide bimorph actuators with discrete heaters are shown to
Peter J. Gilgunn, Gary K. Fedder
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Electrothermal actuator reliability studies

SPIE Proceedings, 2004
Shallow V type symmetric electrothermal actuators which have a central shuttle and overall lengths of ~610 μm, leg widths between 3 and 4.5 μm, and offset angles between 0.7 and 2.3° have been subjected to short term, high stress drive currents under different environmental conditions.
Richard A. Plass, Michael S. Baker, Jeremy A. Walraven   +2 more
openaire   +1 more source