Results 161 to 170 of about 116,914 (208)

Fabrication of an Electrothermally Actuated Electrostatic Microgripper

International Journal of Nonlinear Sciences and Numerical Simulation, 2002
A novel electrostatic microgripper, which can handle micro objects with the electrostatic force, is designed and fabricated. It consists of gripping part with one inner and two outer electrodes, and releasing part with an electrothermal actuator. It grips micro objects using electric field generated between the electrodes, and releases them using the ...
Lee, S.H., Lee, K.-C., Lee, S.S. Lee, Seung Seob, Oh, H.-S.   +3 more
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Scaling of folded electrothermal actuators

2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS), 2010
Scaling of folded electrothermal actuators for optical applications in arrays from 1 mm to 50 µm pitch is presented. A 1-D model of a folded electrothermal actuator is presented to demonstrate the inverse scaling law for power with array pitch and linear scaling for rotational scan range. Metal/oxide bimorph actuators with discrete heaters are shown to
Peter J. Gilgunn, Gary K. Fedder
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Electrothermal actuator reliability studies

SPIE Proceedings, 2004
Shallow V type symmetric electrothermal actuators which have a central shuttle and overall lengths of ~610 μm, leg widths between 3 and 4.5 μm, and offset angles between 0.7 and 2.3° have been subjected to short term, high stress drive currents under different environmental conditions.
Richard A. Plass, Michael S. Baker, Jeremy A. Walraven   +2 more
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Electrothermally actuated MEMS terahertz metamaterial

2014 International Conference on Optical MEMS and Nanophotonics, 2014
We present the design, simulation, fabrication and characterization of a continuously tunable Omega-ring teratahertz metamaterial. The tunability of metamaterial is obtained by integrating electrothermal actuator where higher tuning range, larger stroke and enhanced repeatability are possible.
null ChongPei Ho, Prakash Pitchappa, null Yu-Sheng Lin, null Chengkuo Lee   +3 more
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Performance Comparison of Typical Electrothermal Actuators

Key Engineering Materials, 2013
As the power producer, the micro actuator is an important part of the micro electro- mechanical system, which is used as the conversion of energy, motion and force producing. In this paper, the mechanical models of three bent beam electrothermal actuators are summarized to make comparison with each other and analyze mechanical performance. For Π-shaped
Ling Zhou, Xue Jin Shen, Zhen Lu Wang, Yi Hu   +3 more
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Electrothermally Actuated Microbeams With Varying Stiffness

Volume 4: 22nd Design for Manufacturing and the Life Cycle Conference; 11th International Conference on Micro- and Nanosystems, 2017
We present axially loaded clamped-guided microbeams that can be used as resonators and actuators of variable stiffness, actuation, and anchor conditions. The applied axial load is implemented by U-shaped electrothermal actuators stacked at one of the beams edges.
Sherif Tella, Nouha Alcheikh, Mohammad I. Younis   +2 more
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CMOS–MEMS Lateral Electrothermal Actuators

Journal of Microelectromechanical Systems, 2008
In this paper, a type of lateral electrothermal (ET) actuator fabricated with post-CMOS micromachining is presented. The actuator is a beam with a multimorph structure, composed of CMOS dielectric and metal interconnect. Following structural release, the actuators demonstrate self-assembly under the moments arising from residual stress.
P.J. Gilgunn, null Jingwei Liu, N. Sarkar, G.K. Fedder   +3 more
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The design and analysis of a MEMS electrothermal actuator

Journal of Semiconductors, 2015
This paper introduces a type of out-of-plane microelectrothermal actuator, which is based on the principle of bimetal film thermal expansion in the fuse. A polymer SU-8 material and nickel are used as the functional and structural materials of the actuator. Through heating the resistance wire using electricity, the actuator produces out-of-plane motion
Suocheng Wang, Yongping Hao, Shuangjie Liu   +2 more
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SiC cantilever resonators with electrothermal actuation

Sensors and Actuators A: Physical, 2006
Abstract Cubic SiC cantilever resonators designed for electrothermal actuation are presented. Metal electrodes with both open circuit and short circuit designs have been deposited and patterned on top of the 3C–SiC cantilevers. Pt electrodes on single crystal 3C–SiC cantilevers and NiCr electrodes on poly-crystalline 3C–SiC cantilevers have both been
Jiang L, Cheung R, Hedley J, Hassan M, Harris AJ, Burdess JS, Mehregany M, Zorman CA   +7 more
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Repeatability study of an electrothermally actuated micromirror

2009 IEEE International Reliability Physics Symposium, 2009
With their large scan range and low drive voltages, electrothermally-actuated micromirrors have great potential in optical biomedical imaging applications, but the repeatability and reliability of such micromirrors are not well understood. This paper reports the conditions for achieving repeatability of the embedded resistive heater and the mirror tilt
Sagnik Pal, Huikai Xie
openaire   +1 more source