Results 41 to 50 of about 1,012 (213)

Design, modeling and parametric analysis of Chevron shaped electrothermal actuator using low cost metalMUMPS fabrication process

, 2020
© 2018 IEEE. High force and large displacement at the low actuation voltage is the primary concern for the micro actuators to be used for microelectromechanical systems (MEMS) based devices.
Rehman, MU, Saleem, MM, Awan, SU, Saqib, M   +3 more
core   +1 more source

Electrothermal Phenomena in Ferroelectrics

, 2020
Physical properties of lead-zirconate-titanate (PZT) ceramics change according to the initial electric poling process and electrical boundary conditions.
Kenji Uchino
core   +1 more source

Design and Modeling of Polysilicon Electrothermal Actuators for a MEMS Mirror with Low Power Consumption

Micromachines, 2017
Endoscopic optical-coherence tomography (OCT) systems require low cost mirrors with small footprint size, out-of-plane deflections and low bias voltage.
Miguel Lara-Castro, Adrian Herrera-Amaya, Marco A. Escarola-Rosas, Moisés Vázquez-Toledo, Francisco López-Huerta, Luz A. Aguilera-Cortés, Agustín L. Herrera-May   +6 more
doaj   +1 more source

A force measuring microsystem based on electrothermal V-shaped actuator

Vietnam Journal of Mechanics, 2020
This paper describes design and calculation of an electrothermal V-shaped actuator (EVA) and an amplification mechanism integrated into a force measuring microsystem (FMMS), aims to apply for characterization of a micro beam.
Pham Hong Phuc
doaj   +1 more source

Preparation and performance evaluation of electrothermal actuators using aligned carbon nanotube reinforced epoxy composites

Mechanical Engineering Journal, 2016
By using an aligned multi-walled carbon nanotube (MWCNT) reinforced epoxy composite, an electrothermal bimorph actuator was fabricated and its load and deformation capacities were investigated.
Keiichi SHIRASU, Akihiro NAKAMURA, Go YAMAMOTO, Toshio OGASAWARA, Yoshinobu SHIMAMURA, Yoku INOUE, Toshiyuki HASHIDA   +6 more
doaj   +1 more source

A Fast, Large-Stroke Electrothermal MEMS Mirror Based on Cu/W Bimorph

Micromachines, 2015
This paper reports a large-range electrothermal bimorph microelectromechanical systems (MEMS) mirror with fast thermal response. The actuator of the MEMS mirror is made of three segments of Cu/W bimorphs for lateral shift cancelation and two segments of ...
Xiaoyang Zhang, Liang Zhou, Huikai Xie
doaj   +1 more source

A novel continuously variable angular vertical comb-drive with application in scanning micromirror

, 2013
An angular vertical comb-drive (AVC) with electrically controllable initial comb-offset is presented in the context of a single crystalline silicon scanning micromirror.
Lì, Lì L., Deepak Uttamchandani, Ralf Bauer, Uttamchandani, Deepak G., Bauer, Ralf R., Brown, Gordon G., Gordon Brown, Li Li   +7 more
core   +1 more source

Electrothermal Actuators with Ultrafast Response Speed and Large Deformation [PDF]

Advanced Intelligent Systems, 2020
The ability to fabricate electrothermal actuators (ETAs) simultaneously featuring ultrafast response speed (within 0.1 s), large deformation (bending for at least 360°), high figure‐of‐merit (FoM, larger than 0.1%), and low driving voltage (smaller than 1 V) in a single device is extremely important and challenging for their applications in artificial ...
Guinan Chen, Zhonglin Yang, Wenwen Wang, Lili Bi, Liangjun Chen, Yongwu Peng, Changhui Ye   +6 more
openaire   +2 more sources

Macro Modeling of V-Shaped Electro-Thermal MEMS Actuator with Human Error Factor

Micromachines, 2021
The V-shaped electro-thermal MEMS actuator model, with the human error factor taken into account, is presented in this paper through the cascading ANSYS simulation model and the Fuzzy mathematics calculation model. The Fuzzy mathematics calculation model
Dongpeng Zhang, Anjiang Cai, Yulong Zhao, Tengjiang Hu   +3 more
doaj   +1 more source

Tunable Extraordinary Optical Transmission in the Long‐Wavelength Infrared Range Using Electrostatic MEMS Actuation

Advanced Materials Technologies, EarlyView.
A MEMS‐integrated metamaterial filter enables continuous, low‐voltage spectral tuning in the long‐wavelength infrared (LWIR). The device employs extraordinary optical transmission in a dual suspended metasurface stack, where electrostatic actuation precisely controls the intermembrane air gap.
Oleg Bannik, Fedor Kovalev, Michal Zawierta, Dilusha Silva, Lorenzo Faraone, Ilya Shadrivov, Mariusz Martyniuk   +6 more
wiley   +1 more source