Results 31 to 40 of about 1,012 (213)
Thermal Actuation Based 3-DoF Non-Resonant Microgyroscope Using MetalMUMPs [PDF]
, 2009 High force, large displacement and low voltage consumption are a primary concern for microgyroscopes. The chevron-shaped thermal actuators are unique in terms of high force generation combined with the large displacements at a low operating voltage in ...
Lai, YJ +18 more
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Characterization of electrothermal micro-actuator using image processing algorithm
, 2021 3D fabrication technology has gained a lot of attention recently, with the rapid fabrication of 3D parts for use in various applications. This article presents an electrothermal micro-actuator's characterization study fabricated using digital light ...
AKKUŞ, NİHAT
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A bi-directional electrothermal electromagnetic actuator [PDF]
17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest, 2004 A bi-directional microactuator powered by the combination of electrothermal and electromagnetic forces is successfully demonstrated using both the Poly-MUMPs surface micromachining process and a 50 /spl mu/m SOI process. High output force has been measured from fabricated actuators in both DC and AC operations at non-resonant frequencies.
A. Cao +3 more
openaire +1 more source
Sensors, 2023 In this paper, a portable photoacoustic microscopy (PAM) system is proposed based on a large stroke electrothermal micromirror to achieve high resolution and fast imaging.
Yuanlin Xia +5 more
doaj +1 more source
SU-8 Electrothermal Actuators: Optimization of Fabrication and Excitation for Long-Term Use
Micromachines, 2014 In this paper we examine the suitability of SU-8 2000 as a construction material for electrothermal actuators and the actuator stability for long-term operation. The fabrication of SU-8 was optimized for mechanical and thermal stability.
Thomas Winterstein +5 more
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Soft Actuators Based on Spin‐Crossover Particles Embedded in Thermoplastic Polyurethane
Advanced Intelligent Systems, 2023 Molecular spin‐crossover (SCO) complexes are phase‐change materials that develop large spontaneous strains across the thermally induced phase transition, which can be advantageously used in designing soft actuators.
Yue Zan +6 more
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Actuators for Implantable Devices: A Broad View
Micromachines, 2022 The choice of actuators dictates how an implantable biomedical device moves. Specifically, the concept of implantable robots consists of the three pillars: actuators, sensors, and powering.
Bingxi Yan
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Micromachines, 2018 Photonic packaging, which includes high-precision assembly of photonic sub-systems, is currently a bottleneck in the development of commercially-available integrated photonic products.
Kai Wu, Marcel Tichem
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Lissajous Scan From an Optical Fiber Scanner
IEEE Access, 2023 Optical devices are frequently being used in medical applications to image lesions and malignancies, and to assist with surgical procedures. The advances in micro-electro-mechanical systems (MEMSs) and optics led to the fabrication of flexible endoscopes
Mandeep Kaur, Carlo Menon
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Parallel-beams/lever electrothermal out-of-plane actuator [PDF]
, 2003 We report on the design, modeling, fabrication and testing of a new electrothermal actuator allowing for various modes of movement and exhibiting large enough forces to be usable in a micro-tribotester.
G. Krijnen +7 more
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