Results 21 to 30 of about 116,914 (208)
Multiphase Actuation of AC Electrothermal Micropump
Micromachines, 2023 Electrothermal micropumps apply an AC electric field to a conductive fluid within the range of 10 kHz–1 MHz to generate fluid flow. In this frequency range, coulombic forces dominate fluid interactions over opposing dielectric forces, resulting in high flow rates (~50–100 μm/s).
Stirling Cenaiko +2 more
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Performance Analysis of a CSFH-Based Microgripper: Analytical Modeling and Simulation
Micromachines, 2022 Microgrippers are promising tools for micro-manipulation and characterization of cells. In this paper, a biocompatible electro-thermally actuated microgripper with rotary capacitive position sensor is presented.
Teferi Sitotaw Yallew +3 more
doaj +1 more source
Advances in Mechanical Engineering, 2021 In this paper, an electrothermal shape memory alloy helical spring actuator constructed from shape memory alloy with copper-cored enameled wire is presented and fabricated.
Yang Xiong, Jin Huang, Ruizhi Shu
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Heat Transfer Scale Effect Analysis and Parameter Measurement of an Electrothermal Microgripper
Micromachines, 2021 An electrothermal microgripper is an important actuator in microelectromechanical and micro-operating systems, and its temperature field analysis is the core problem in research and design. Because of the small size of an electrothermal microgripper, its
Lin Lin +5 more
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Coupled Finite Element-Finite Volume Multi-Physics Analysis of MEMS Electrothermal Actuators
Micromachines, 2021 Microelectromechanical systems (MEMS) are the instruments of choice for high-precision manipulation and sensing processes at the microscale. They are, therefore, a subject of interest in many leading industrial and academic research sectors owing to ...
Thomas Sciberras +5 more
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Electrothermal Actuators for SiO2 Photonic MEMS [PDF]
Micromachines, 2016 This paper describes the design, fabrication and characterization of electrothermal bimorph actuators consisting of polysilicon on top of thick (>10 μ m ) silicon dioxide beams. This material platform enables the integration of actuators with photonic waveguides, producing mechanically-flexible photonic waveguide structures that are ...
Tjitte-Jelte Peters, Marcel Tichem
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Electrothermally-Actuated Micromirrors with Bimorph Actuators—Bending-Type and Torsion-Type [PDF]
Sensors, 2015 Three different electrothermally-actuated MEMS micromirrors with Cr/Au-Si bimorph actuators are proposed. The devices are fabricated with the SOIMUMPs process developed by MEMSCAP, Inc. (Durham, NC, USA). A silicon-on-insulator MEMS process has been employed for the fabrication of these micromirrors.
Cheng-hua Tsai +4 more
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Z-Shaped Electrothermal Microgripper Based on Novel Asymmetric Actuator
Micromachines, 2022 Based on a V-shaped microactuator with a pair of beams, modifications were made to the length and width of a microactuator to observe the effects. A theoretical approach and numerical characterization of the modified microactuator were performed.
Margarita Tecpoyotl-Torres +4 more
doaj +1 more source
Fabrication of graphene based electrothermal cantilever actuator [PDF]
The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 2013 A novel actuator has been fabricated using graphene and graphene oxide composite paper as building blocks. The two materials have nearly equal Young's modulus, however a large displacement was observed during the electromechanically driven operation, which was attributed to great difference in coefficient of thermal expansion of graphene paper and ...
Yilong Zhou +3 more
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A novel continuously variable angular vertical comb-drive with application in scanning micromirror [PDF]
, 2013 An angular vertical comb-drive (AVC) with electrically controllable initial comb-offset is presented in the context of a single crystalline silicon scanning micromirror.
Lì, Lì L. +7 more
core +3 more sources