Results 11 to 20 of about 1,012 (213)
A Low-Power-Consumption Out-of-Plane Electrothermal Actuator [PDF]
Journal of Microelectromechanical Systems, 2007 This paper proposes a new vertical electrothermal actuator. It can be considered as a hybrid between the traditional in-plane buckle-beam actuator and the vertical hot-cold actuator. It is here referred to as vertical buckle beam. At identical dimensional and bias conditions, it features a displacement larger than that of other vertical electrothermal ...
David Girbau +2 more
exaly +5 more sources
Micromachines, 2021 This paper presents the theoretical thermal-mechanical modeling and parameter analyses of a novel three-dimensional (3D) electrothermal microgripper with three fingers.
Guoning Si +3 more
doaj +2 more sources
Micromachines, 2021 This paper presents the design, fabrication, and testing of a novel three-dimensional (3D) three-fingered electrothermal microgripper with multiple degrees of freedom (multi DOFs).
Guoning Si +3 more
doaj +2 more sources
Design and fabrication of an electrothermal MEMS micro-actuator with 3D printing technology
Materials Research Express, 2020 This study presents the design and fabrication results of an electrothermal micro-electro-mechanical system (MEMS) actuator. Unlike traditional one-directional U-shaped actuators, this bi-directional electrothermal (BET) micro-actuator can produce ...
O Ulkir
doaj +2 more sources
Mechanical Performance of a Cascaded V-Shaped Electrothermal Actuator
International Journal of Advanced Robotic Systems, 2013 The function and performance of MEMS are affected by the output ability of the displacement and force of microactuators. The lateral deflection of cascaded V-shaped electrothermal actuators is modelled as a triple, statically indeterminate problem.
Xuejin Shen, Xiangyu Chen
doaj +2 more sources
Study on the Driving Performance and Influencing Factors of Multi-Electrothermal Co-Actuation Devices Considering Application Environments [PDF]
MicromachinesElectrothermal actuators, with their simple structure, small size, strong anti-interference ability, and easy integration, have emerged as a promising solution for micro-drive technology.
Yujuan Tang +3 more
doaj +2 more sources
Smart resonant micro-sensor and micro-actuator: high-performance, wide range bi-axial magnetic sensitive/ insensitive micro-device for multifunctional sensing applications [PDF]
Microsystems & NanoengineeringWith the rapid development of intelligent and autonomous systems, such as wearable health monitoring and advanced manufacturing robots, there is a growing demand for the development of advanced, miniaturized smart sensors and actuator systems.
Hanin Amara +2 more
doaj +2 more sources
Effect of Metal Coating on Displacement of the Silicon Electrothermal V-Shaped Actuator
Machines, 2023 Electrothermal actuation is widely employed in MEMS systems, and the electrothermal V-shaped actuator (referred to as EVA) has garnered attention due to its stable output force.
Fengqi Dai +3 more
doaj +2 more sources
Theoretical Model and Dynamic Performance of V-Shaped Electrothermal Actuator
Shanghai Jiaotong Daxue xuebao, 2021 To study the dynamic performance of the V-shaped electrothermal actuator, electrothermal and thermoelastic coupling models are established based on the heat transfer theory and the forced vibration equation, respectively. A one dimensional multi-physical
CHEN Hao, WANG Xinjie, WANG Jiong, XI Zhanwen, NIE Weirong
doaj +1 more source
Multiphase Actuation of AC Electrothermal Micropump
Micromachines, 2023 Electrothermal micropumps apply an AC electric field to a conductive fluid within the range of 10 kHz–1 MHz to generate fluid flow. In this frequency range, coulombic forces dominate fluid interactions over opposing dielectric forces, resulting in high flow rates (~50–100 μm/s).
Stirling Cenaiko +2 more
openaire +3 more sources