Review of Electrothermal Actuators and Applications [PDF]
Actuators, 2019 This paper presents a review of electrothermal micro-actuators and applications. Electrothermal micro-actuators have been a significant research interest over the last two decades, and many different designs and applications have been investigated.
Wang Changhai +2 more
exaly +6 more sources
Electrothermal Actuators for SiO2 Photonic MEMS [PDF]
Micromachines, 2016 This paper describes the design, fabrication and characterization of electrothermal bimorph actuators consisting of polysilicon on top of thick (>10 μ m ) silicon dioxide beams.
Tjitte-Jelte Peters, Marcel Tichem
doaj +7 more sources
Design and Modeling of Polysilicon Electrothermal Actuators for a MEMS Mirror with Low Power Consumption [PDF]
Micromachines, 2017 Endoscopic optical-coherence tomography (OCT) systems require low cost mirrors with small footprint size, out-of-plane deflections and low bias voltage.
FRANCISCO Lopez-Huerta +1 more
exaly +5 more sources
Coupled Finite Element-Finite Volume Multi-Physics Analysis of MEMS Electrothermal Actuators [PDF]
Micromachines, 2021 Microelectromechanical systems (MEMS) are the instruments of choice for high-precision manipulation and sensing processes at the microscale. They are, therefore, a subject of interest in many leading industrial and academic research sectors owing to ...
Thomas Sciberras +5 more
doaj +4 more sources
Electrothermal Actuators with Ultrafast Response Speed and Large Deformation [PDF]
Advanced Intelligent Systems, 2020 The ability to fabricate electrothermal actuators (ETAs) simultaneously featuring ultrafast response speed (within 0.1 s), large deformation (bending for at least 360°), high figure‐of‐merit (FoM, larger than 0.1%), and low driving voltage (smaller than ...
Guinan Chen, Zhonglin Yang, Lili Bi
exaly +3 more sources
Design and Driving Characteristics of a Bidirectional Micro-Device Based on Multi-Electrothermal Co-Actuation [PDF]
MicromachinesIn this paper, a bidirectional micro-device based on multi-electrothermal co-actuation is proposed for a fuze safety system, combining the advantages of the simple structure, small size, low input voltage, large output, and absence of electromagnetic ...
Yujuan Tang +3 more
doaj +2 more sources
Post-Release Deformation and Motion Control of Photonic Waveguide Beams by Tuneable Electrothermal Actuators in Thick SiO2 [PDF]
Micromachines, 2018 Photonic packaging, which includes high-precision assembly of photonic sub-systems, is currently a bottleneck in the development of commercially-available integrated photonic products.
Kai Wu, Marcel Tichem
doaj +2 more sources
Electrothermally-Actuated Micromirrors with Bimorph Actuators—Bending-Type and Torsion-Type [PDF]
Sensors, 2015 Three different electrothermally-actuated MEMS micromirrors with Cr/Au-Si bimorph actuators are proposed. The devices are fabricated with the SOIMUMPs process developed by MEMSCAP, Inc. (Durham, NC, USA).
Cheng-Hua Tsai +4 more
doaj +3 more sources
Study on the Driving Performance and Influencing Factors of Multi-Electrothermal Co-Actuation Devices Considering Application Environments [PDF]
MicromachinesElectrothermal actuators, with their simple structure, small size, strong anti-interference ability, and easy integration, have emerged as a promising solution for micro-drive technology.
Yujuan Tang +3 more
doaj +2 more sources
Biocompatible low-voltage electrothermal actuators with biological operational temperature range [PDF]
Communications MaterialsMuscle loss can severely affect movement and physiological functions, driving interest in artificial muscle development. Although various soft actuators exist, ensuring biocompatibility—especially in terms of heat transfer and non-cytotoxicity—remains a ...
Adéla Slavíková +9 more
doaj +2 more sources