Results 151 to 160 of about 1,106 (198)
Fabrication and Characterization of Graphene-Mesoporous Carbon-Nickel-Poly(Vinyl Alcohol)-Coated Mandrel-Coiled TCPFLNR Artificial Muscle. [PDF]
Matharu PS, Song Y, Gandhi U, Tadesse Y.
europepmc +1 more source
Modeling of Beam Electrothermal Actuators
Beam electrothermal actuators amplify the thermal expansion of pre-shaped beams and use the symmetrical structure to create a linear motion. These actuators, including V and Z shapes, are widely used in microsystems. Explicit analytical expressions are derived in this paper governing the structural deformation of these actuators due to electrothermal ...
Hussein Hussein +2 more
exaly +4 more sources
Wireless Power Transfer to Electrothermal Liquid Crystal Elastomer Actuators
Wireless actuation of electrically driven soft actuators is of paramount importance for the development of bioinspired soft robotics without physical connection or on-board batteries.
Cristian Valenzuela +2 more
exaly +10 more sources
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Recent Progress of Soft Electrothermal Actuators
Soft Robotics, 2021Developing soft electrothermal actuators (ETAs) has drawn extensive concern in recent years. This article presents a comprehensive review on recent progress of soft ETAs through five sections: device design on structure and materials, property, fabrication methods, applications, and prospects. It's found that the fabrication process can be divided into
Yu-Tao Li, He Tian
exaly +3 more sources
Sub-micron metallic electrothermal actuators
The scaling down of electromechanical devices from micrometer scales to nano scales is of great interest. This paper presents fabrication and characterization of sub-micron high aspect ratio metallic electrothermal actuators using a combination of electron beam lithography and electroplating techniques.
Lee, JS +4 more
openaire +3 more sources
Scaling of folded electrothermal actuators
2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS), 2010Scaling of folded electrothermal actuators for optical applications in arrays from 1 mm to 50 µm pitch is presented. A 1-D model of a folded electrothermal actuator is presented to demonstrate the inverse scaling law for power with array pitch and linear scaling for rotational scan range. Metal/oxide bimorph actuators with discrete heaters are shown to
Gary K Fedder
exaly +2 more sources
Modelling surface-micromachined electrothermal actuators
Canadian Journal of Electrical and Computer Engineering, 2004A method for the accurate simulation of electrothermal actuators is presented. The model accounts for variations in material parameters that occur over the temperature range at which polysilicon electrothermal actuators are operated. The paper then presents the steps necessary to perform a sequential electrothermal-mechanical analysis using ANSYS ...
M Parameswaran
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Development of X-beam electrothermal actuators
A new electrothermal actuator with X-shaped single crystal silicon beam structure is proposed and characterized. This new actuator is made by using SOI-DRIE processes. X-beam actuator of 2000 μm projection length and 0.5° tilted angle can generate 90 μm static displacement. This new design shows a better static displacement and stability in long travel
Chengkuo Lee, J. Andrew. Yeh
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A micromachined RF microrelay with electrothermal actuation
Abstract This paper reports the design and fabrication of a low-voltage lateral-contact microrelay for RF applications. The silicon surface micromachined relay utilizes electrothermal actuators and low-stress silicon nitride as a structural connection as well as electrical and thermal isolation. The sidewall contact is sputtered gold.
Tien, NC, Li, Z, McCormick, DT, Wang, Y
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Fabrication of an Electrothermally Actuated Electrostatic Microgripper
International Journal of Nonlinear Sciences and Numerical Simulation, 2002A novel electrostatic microgripper, which can handle micro objects with the electrostatic force, is designed and fabricated. It consists of gripping part with one inner and two outer electrodes, and releasing part with an electrothermal actuator. It grips micro objects using electric field generated between the electrodes, and releases them using the ...
Lee, S.H. +3 more
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