Results 161 to 170 of about 1,106 (198)
Low-Voltage-Driven Soft Electrothermal Actuators Based on Phase-Change Materials
ACS Applied Electronic Materials, 2023 Traditional pneumatic soft actuators have been widely used in the field of soft robotics owing to their high output force and large deformation capabilities.
Fanan Wei
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Single-process 3D-printed bimorph electrothermal soft actuators
International Journal of Mechanical SciencesThe manufacturing of bimorph, electrothermal actuators conventionally requires multiple processing steps, which limits design flexibility and customization.
Janko Slavic
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Electrothermal actuator reliability studies
SPIE Proceedings, 2004Shallow V type symmetric electrothermal actuators which have a central shuttle and overall lengths of ~610 μm, leg widths between 3 and 4.5 μm, and offset angles between 0.7 and 2.3° have been subjected to short term, high stress drive currents under different environmental conditions.
Richard A. Plass +2 more
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Electrothermally actuated inline microfluidic valve
Sensors and Actuators A: Physical, 2003A normally open electrothermally actuated inline microvalve that has been developed, fabricated and tested with liquids is presented. These actuators use high volumetric expansion of a sealed patch of Paraffin heated above its melting point, providing large displacements and forces while using low power. The inline valve is surface micromachined on top
P Selvaganapathy +2 more
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Corrections to “Parallel In-Plane Electrothermal Actuators”
Journal of Microelectromechanical SystemsYen Nee Ho, Aron Michael, Chee Yee Kwok
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CMOS–MEMS Lateral Electrothermal Actuators
Journal of Microelectromechanical Systems, 2008In this paper, a type of lateral electrothermal (ET) actuator fabricated with post-CMOS micromachining is presented. The actuator is a beam with a multimorph structure, composed of CMOS dielectric and metal interconnect. Following structural release, the actuators demonstrate self-assembly under the moments arising from residual stress.
P.J. Gilgunn +3 more
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Electrothermally actuated MEMS terahertz metamaterial
2014 International Conference on Optical MEMS and Nanophotonics, 2014We present the design, simulation, fabrication and characterization of a continuously tunable Omega-ring teratahertz metamaterial. The tunability of metamaterial is obtained by integrating electrothermal actuator where higher tuning range, larger stroke and enhanced repeatability are possible.
null ChongPei Ho +3 more
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The design and analysis of a MEMS electrothermal actuator
Journal of Semiconductors, 2015This paper introduces a type of out-of-plane microelectrothermal actuator, which is based on the principle of bimetal film thermal expansion in the fuse. A polymer SU-8 material and nickel are used as the functional and structural materials of the actuator. Through heating the resistance wire using electricity, the actuator produces out-of-plane motion
Suocheng Wang +2 more
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Experimental Mechanics, 2012 Electrothermal actuators fabricated using the Polysilicon Multi-User MEMS Process (PolyMUMPs) and the Sandia Ultra-Planar, Multi-Level MEMS Technology 5 (SUMMiT V) have been investigated for use in integrated microelectromechanical systems (MEMS) safe ...
Lake, Robert A. +6 more
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SiC cantilever resonators with electrothermal actuation
Sensors and Actuators A: Physical, 2006Abstract Cubic SiC cantilever resonators designed for electrothermal actuation are presented. Metal electrodes with both open circuit and short circuit designs have been deposited and patterned on top of the 3C–SiC cantilevers. Pt electrodes on single crystal 3C–SiC cantilevers and NiCr electrodes on poly-crystalline 3C–SiC cantilevers have both been
Jiang L +7 more
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