<title>Microfabrication of membrane-based devices by HARSE and combined HARSE/wet etching</title>
Ronald P. Manginell +4 more
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Low-loss silicon nitride Kerr-microresonators fabricated with metallic etch masks via metal lift-off. [PDF]
Colación GM, Rukh L, Buck FH, Drake TE.
europepmc +1 more source
Homogeneous Free-Standing Nanostructures from Bulk Diamond over Millimeter Scales for Quantum Technologies. [PDF]
Corazza A +7 more
europepmc +1 more source
Experimental Realization of On-Chip Surface Acoustic Wave Metasurfaces at Sub-GHz. [PDF]
Wang W +10 more
europepmc +1 more source
Photolithographic Microfabrication of Microbatteries for On-Chip Energy Storage. [PDF]
Ma Y, Wang S, Wu ZS.
europepmc +1 more source
A Microfabrication Technique for High-Performance Diffractive Optical Elements Tailored for Numerical Simulation. [PDF]
Dai X +8 more
europepmc +1 more source
New Deep Reactive Ion Etching Process Developed for the Microfabrication of Silicon Carbide
Laura J. Evans, Glenn M. Beheim
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Sampling Probes Microfabricated from Parylene‑C for In Vivo Neurochemical Monitoring. [PDF]
White T +5 more
europepmc +1 more source
Nanoneedle-Based Transdermal Gene Delivery: A Minimally Invasive Strategy for Gene Therapy. [PDF]
Akbuğa FJ, Arpa MD, Şalva E.
europepmc +1 more source
Controlling Etch Anisotropy of Crystalline Germanium Nanostructures. [PDF]
Saidov K +5 more
europepmc +1 more source

