Results 121 to 130 of about 1,385 (209)
, 2008 Une technologie novatrice de fabrication des FBAR a tout d'abord été développée : en particulier des techniques de dépôt et de micro-mécanisation de la structure en couches du résonateur ont été mises au point.
NOUET, Pascal +2 more
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Recent Advances in AlN-Based Acoustic Wave Resonators. [PDF]
Micromachines (Basel)Lu H +7 more
europepmc +1 more source
Fabrication of 4 GHz FBAR filter using AlN thin film
, 2019 In this study, the high frequency FBAR filters are fabricated using film bulk acoustic resonators (FBARs) for 4 GHz band. FBARs are formed using a sandwiched structure with bottom (Mo) and top (Al/Ti) electrodes and aluminum nitride (AlN) piezoelectric ...
Lee , Da-Chien
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A Review of Wafer-Level Packaging Technology for SAW and BAW Filters. [PDF]
Micromachines (Basel)Liu X +5 more
europepmc +1 more source
Acoustofluidic Biosensors. [PDF]
Micromachines (Basel)Chen CJ, Kwon JS, Chuang HS.
europepmc +1 more source
Microwave Diamond-Based HBAR as a Highly Sensitive Sensor for Multiple Applications: Acoustic Attenuation in the Mo Film. [PDF]
Sensors (Basel), 2023 Sorokin B +5 more
europepmc +1 more source
C-Axis Oriented LiNbO<sub>3</sub> Thin Film Grown by Chemical Beam Epitaxy for Surface Acoustic Wave Device Applications. [PDF]
Sensors (Basel)Smagin N +12 more
europepmc +1 more source
Investigation of sorptive interactions between volatile organic compounds and supramolecules at dynamic oscillation using bulk acoustic wave resonator virtual sensor arrays. [PDF]
Microsyst NanoengWang Z +7 more
europepmc +1 more source
Editorial: Methodological issues in psychology and social sciences research. [PDF]
Front Psychol, 2022 Espejo B, Martín-Carbonell M, Checa I.
europepmc +1 more source