Results 241 to 250 of about 108,927 (272)

Enhanced Secondary-Electron Detection of Single-Ion Implants in Silicon through Thin SiO<sub>2</sub> Layers. [PDF]

open access: yesNano Lett
Schneider EB   +9 more
europepmc   +1 more source

In situ real-time annealing of 3D ferromagnetic nanowires fabricated by focused electron beam induced deposition

open access: gold, 2019
Javier Pablo‐Navarro   +5 more
openalex   +1 more source

Focused electron beam induced deposition of gold

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, 2000
Codeposition of hydrocarbons is a severe problem during focused electron beam writing of pure metal nanostructures. When using organometallic precursors, a low metal content carbonaceous matrix embedding and separating numerous nanosized metal clusters is formed. In this work, we present a new and easy approach to obtain high purity gold lines: the use
I. Utke   +5 more
openaire   +1 more source

Ultralow-energy focused electron beam induced deposition

Applied Physics Letters, 1994
We have studied focused electron beam induced deposition from W(CO)6 at beam primary energies between 20 and 0.06 keV. Submicrometer resolution with 4 nA beam current was maintained at very low primary energies using a retarding field configuration. Decomposition cross sections of W(CO)6 for primary energies below about 1 keV were found to be about a ...
P. C. Hoyle, J. R. A. Cleaver, H. Ahmed
openaire   +1 more source

Home - About - Disclaimer - Privacy