Pattern generation for direct-write three-dimensional nanoscale structures via focused electron beam induced deposition. [PDF]
Beilstein J Nanotechnol, 2018 Fabrication of three-dimensional (3D) nanoarchitectures by focused electron beam induced deposition (FEBID) has matured to a level that highly complex and functional deposits are becoming available for nanomagnetics and plasmonics.
Keller L, Huth M.
europepmc +2 more sources
Focused electron beam induced deposition meets materials science [PDF]
Microelectronic Engineering, 2018 Focused electron beam induced deposition (FEBID) is a direct-write method for the fabrication of nanostructures whose lateral resolution rivals that of advanced electron lithography but is in addition capable of creating complex three-dimensional nano-architectures.
M. Huth, F. Porrati, O.V. Dobrovolskiy
openaire +4 more sources
Structural Analysis of Si(OEt)4 Deposits on Au(111)/SiO2 Substrates at the Nanometer Scale Using Focused Electron Beam-Induced Deposition. [PDF]
ACS Omega, 2023 Mason NJ +5 more
europepmc +3 more sources
Comparing postdeposition reactions of electrons and radicals with Pt nanostructures created by focused electron beam induced deposition. [PDF]
Beilstein J Nanotechnol, 2017 The ability of electrons and atomic hydrogen (AH) to remove residual chlorine from PtCl2 deposits created from cis-Pt(CO)2Cl2 by focused electron beam induced deposition (FEBID) is evaluated.
Spencer JA +8 more
europepmc +2 more sources
Magnetic characterization of cobalt nanowires and square nanorings fabricated by focused electron beam induced deposition. [PDF]
Beilstein J Nanotechnol, 2018 The magnetic properties of nanowires (NWs) and square nanorings, which were deposited by focused electron beam induced deposition (FEBID) of a Co carbonyl precursor, are studied using off-axis electron holography (EH), Lorentz transmission electron ...
Venturi F +5 more
europepmc +2 more sources
Three dimensional magnetic nanowires grown by focused electron-beam induced deposition. [PDF]
Sci Rep, 2013 Control of the motion of domain walls in magnetic nanowires is at the heart of various recently proposed three-dimensional (3D) memory devices. However, fabricating 3D nanostructures is extremely complicated using standard lithography techniques. Here we show that highly pure 3D magnetic nanowires with aspect-ratios of ~100 can be grown using focused ...
Fernández-Pacheco A +8 more
europepmc +6 more sources
Submicrometer Hall devices fabricated by focused electron-beam-induced deposition [PDF]
Applied Physics Letters, 2005 Hall devices having an active area of about (500 nm)(2) are fabricated by focused electron-beam-induced deposition. The deposited material consists of cobalt nanoparticles in a carbonaceous matrix. The realized devices have, at room temperature, a current sensitivity of about 1 V/AT, a resistance of a few kilo-ohms, and can be biased with a maximum ...
G. Boero +9 more
openaire +3 more sources
Pillar Growth by Focused Electron Beam-Induced Deposition Using a Bimetallic Precursor as Model System: High-Energy Fragmentation vs. Low-Energy Decomposition. [PDF]
Nanomaterials (Basel), 2023 Winkler R +9 more
europepmc +3 more sources
The role of low-energy electrons in focused electron beam induced deposition: four case studies of representative precursors. [PDF]
Beilstein J Nanotechnol, 2015 Focused electron beam induced deposition (FEBID) is a single-step, direct-write nanofabrication technique capable of writing three-dimensional metal-containing nanoscale structures on surfaces using electron-induced reactions of organometallic precursors.
Thorman RM +3 more
europepmc +2 more sources
Response under low-energy electron irradiation of a thin film of a potential copper precursor for focused electron beam induced deposition (FEBID). [PDF]
Beilstein J Nanotechnol, 2018 Sala L +4 more
europepmc +3 more sources