Modelling focused electron beam induced deposition beyond Langmuir adsorption [PDF]
Beilstein Journal of Nanotechnology, 2017 In this work, the continuum model for focused electron beam induced deposition (FEBID) is generalized to account for multilayer adsorption processes.
Dédalo Sanz-Hernández +1 more
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Focused electron beam induced deposition: A perspective [PDF]
Beilstein Journal of Nanotechnology, 2012 Background: Focused electron beam induced deposition (FEBID) is a direct-writing technique with nanometer resolution, which has received strongly increasing attention within the last decade. In FEBID a precursor previously adsorbed on a substrate surface
Michael Huth +7 more
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Correction: Modelling focused electron beam induced deposition beyond Langmuir adsorption [PDF]
Beilstein Journal of Nanotechnology, 2017 [This corrects the article DOI: 10.3762/bjnano.8.214.].
Dédalo Sanz-Hernández +1 more
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In situ growth optimization in focused electron-beam induced deposition [PDF]
Beilstein Journal of Nanotechnology, 2013 We present the application of an evolutionary genetic algorithm for the in situ optimization of nanostructures that are prepared by focused electron-beam-induced deposition (FEBID).
Paul M. Weirich +3 more
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The role of electron-stimulated desorption in focused electron beam induced deposition [PDF]
Beilstein Journal of Nanotechnology, 2013 We present the results of our study about the deposition rate of focused electron beam induced processing (FEBIP) as a function of the substrate temperature with the substrate being an electron-transparent amorphous carbon membrane.
Willem F. van Dorp +3 more
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Electron-stimulated purification of platinum nanostructures grown via focused electron beam induced deposition [PDF]
Beilstein Journal of Nanotechnology, 2015 Platinum–carbon nanostructures deposited via electron beam induced deposition from MeCpPt(IV)Me3 are purified during a post-deposition electron exposure treatment in a localized oxygen ambient at room temperature.
Brett B. Lewis +5 more
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Combined Focused Electron Beam-Induced Deposition and Etching for the Patterning of Dense Lines without Interconnecting Material [PDF]
Micromachines, 2020 High resolution dense lines patterned by focused electron beam-induced deposition (FEBID) have been demonstrated to be promising for lithography. One of the challenges is the presence of interconnecting material, which is often carbonaceous, between the ...
Sangeetha Hari +4 more
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Ligand Size and Carbon-Chain Length Study of Silver Carboxylates in Focused Electron-Beam-Induced Deposition [PDF]
Nanomaterials, 2023 Gas-assisted focused electron-beam-induced deposition is a versatile tool for the direct writing of complex-shaped nanostructures with unprecedented shape fidelity and resolution.
Jakub Jurczyk +8 more
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Low-resistivity, high-resolution W-C electrical contacts fabricated by direct-write focused electron beam induced deposition [version 1; peer review: 2 approved] [PDF]
Open Research Europe, 2022 Background: The use of a focused ion beam to decompose a precursor gas and produce a metallic deposit is a widespread nanolithographic technique named focused ion beam induced deposition (FIBID).
Fabian Sigloch +3 more
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Long-Term Performance of Magnetic Force Microscopy Tips Grown by Focused Electron Beam Induced Deposition [PDF]
Sensors, 2023 High-resolution micro- and nanostructures can be grown using Focused Electron Beam Induced Deposition (FEBID), a direct-write, resist-free nanolithography technology which allows additive patterning, typically with sub-100 nm lateral resolution, and down
Alix Tatiana Escalante-Quiceno +4 more
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