Results 81 to 90 of about 2,912 (170)

Quantitative Study of Metal Gettering in Silicon

open access: yes, 1985
Intrinsic gettering of iron in silicon has been investigated with a novel quantitative approach. Concentrations of electrically active, interstitial iron were determined by Electron Pararnagnetic Resonnance before, and after, various annealing cycles ...
E. R. Weber, Etienne G. Colas, S. Hahn
core   +1 more source

Gettering of Pd to implantation-induced nanocavities in Si [PDF]

open access: yes, 2015
The gettering of Pd to nanocavities in Si for implantation doses ranging from 5×10¹³ to 1×10¹⁵ cm¯² and annealing temperatures ranging from 750 to 1050 °C was investigated using Rutherford backscattering and cross-sectional transmission electron ...
de M. Azevedo, G.   +3 more
core   +1 more source

Main defect reactions behind phosphorus diffusion gettering of iron

open access: yes, 2022
Art. 244503, 8 S.Phosphorus diffusion is well known to getter effectively metal impurities during silicon solar cell processing. However, the main mechanisms behind phosphorus diffusion gettering are still unclear.
Schön, Jonas   +5 more
core   +1 more source

Physical Modeling of Backside Gettering

open access: yes, 1984
To understand gettering action we have modeled the diffusion of metal to a backside getter. A first order model describing the diffusion of metals to an infinite backside sink is found not to fit experimental data.
Gary B. Bronner, James D. Plummer
core   +1 more source

Copper in silicon: Quantitative analysis of internal and proximity gettering [PDF]

open access: yes, 1997
The behavior of copper in the presence of a proximity gettering mechanism and a standard internal gettering mechanism in silicon was studied. He implantation-induced cavities in the near surface region were used as a proximity gettering mechanism and ...
Weber, E.R., McHugo, S.A., Flink, C.
core  

Gettering In Silicon

open access: yes, 1986
This paper reviews the basis for phenomenological path for gettering: release, diffusionand capture in the context of old and new developments. More recent precipitation studies in silicon are now recognized to involve complex interactive effects ...
T. F. Seidel
core   +1 more source

Intrinsic Gettering in Oxygen-Free Silicon

open access: yes, 1984
We found that the intrinsic gettering can be effectively realized in oxygen-lean Czochralski silicon grown in a magnetic field as well as in oxygen-free float-zone silicon.
K. Nauka, H. C. Gatos, J. Lagowski
core   +1 more source

Impact of high-temperature processing steps on the long-term stability of charge carrier lifetime in n-type FZ-silicon

open access: yesEPJ Photovoltaics
In this work, the long-term behavior of excess charge carrier lifetime in n-type FZ-Si wafers without presence of highly doped layers is investigated during illumination at elevated temperatures.
Mehler Melanie   +5 more
doaj   +1 more source

Impurity Gettering in Silicon by Thin Polycrystalline Films

open access: yes, 1992
Capability of impurity gettering by thin polycrystalline films on the backside of silicon wafer was evaluated by minority-carrier diffusion length. Cu was gettered easily during usual cooling after high temperature annealing.
Y. Hayamizu, S. Ushio, T. Takenaka
core   +1 more source

Main defect reactions behind phosphorus diffusion gettering of iron [PDF]

open access: yes, 2014
Phosphorus diffusion is well known to getter effectively metal impurities during silicon solar cell processing. However, the main mechanisms behind phosphorus diffusion gettering are still unclear.
Schön, Jonas   +5 more
core   +1 more source

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