Results 81 to 90 of about 2,912 (170)
Quantitative Study of Metal Gettering in Silicon
Intrinsic gettering of iron in silicon has been investigated with a novel quantitative approach. Concentrations of electrically active, interstitial iron were determined by Electron Pararnagnetic Resonnance before, and after, various annealing cycles ...
E. R. Weber, Etienne G. Colas, S. Hahn
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Gettering of Pd to implantation-induced nanocavities in Si [PDF]
The gettering of Pd to nanocavities in Si for implantation doses ranging from 5×10¹³ to 1×10¹⁵ cm¯² and annealing temperatures ranging from 750 to 1050 °C was investigated using Rutherford backscattering and cross-sectional transmission electron ...
de M. Azevedo, G. +3 more
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Main defect reactions behind phosphorus diffusion gettering of iron
Art. 244503, 8 S.Phosphorus diffusion is well known to getter effectively metal impurities during silicon solar cell processing. However, the main mechanisms behind phosphorus diffusion gettering are still unclear.
Schön, Jonas +5 more
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Physical Modeling of Backside Gettering
To understand gettering action we have modeled the diffusion of metal to a backside getter. A first order model describing the diffusion of metals to an infinite backside sink is found not to fit experimental data.
Gary B. Bronner, James D. Plummer
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Copper in silicon: Quantitative analysis of internal and proximity gettering [PDF]
The behavior of copper in the presence of a proximity gettering mechanism and a standard internal gettering mechanism in silicon was studied. He implantation-induced cavities in the near surface region were used as a proximity gettering mechanism and ...
Weber, E.R., McHugo, S.A., Flink, C.
core
This paper reviews the basis for phenomenological path for gettering: release, diffusionand capture in the context of old and new developments. More recent precipitation studies in silicon are now recognized to involve complex interactive effects ...
T. F. Seidel
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Intrinsic Gettering in Oxygen-Free Silicon
We found that the intrinsic gettering can be effectively realized in oxygen-lean Czochralski silicon grown in a magnetic field as well as in oxygen-free float-zone silicon.
K. Nauka, H. C. Gatos, J. Lagowski
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In this work, the long-term behavior of excess charge carrier lifetime in n-type FZ-Si wafers without presence of highly doped layers is investigated during illumination at elevated temperatures.
Mehler Melanie +5 more
doaj +1 more source
Impurity Gettering in Silicon by Thin Polycrystalline Films
Capability of impurity gettering by thin polycrystalline films on the backside of silicon wafer was evaluated by minority-carrier diffusion length. Cu was gettered easily during usual cooling after high temperature annealing.
Y. Hayamizu, S. Ushio, T. Takenaka
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Main defect reactions behind phosphorus diffusion gettering of iron [PDF]
Phosphorus diffusion is well known to getter effectively metal impurities during silicon solar cell processing. However, the main mechanisms behind phosphorus diffusion gettering are still unclear.
Schön, Jonas +5 more
core +1 more source

