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A Micromachined Electrochemical Angular Accelerometer Based on Interdigital Electrodes
2021 IEEE 16th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS), 2021This study proposes a micromachined electrochemical angular accelerometer based on interdigital electrodes, with the ability to measure low-frequency angular acceleration. In this paper, the design, fabrication, and characterization of the angular accelerometer were included, with a sensitivity of 100 V/(rad/s2) at 0.01Hz.
Tian Liang +10 more
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Dielectrophoretic liquid lens driven by interdigitated sidewall electrodes
Optics Letters, 2023This paper proposes a dielectrophoretic (DEP) liquid lens that is driven by interdigitated electrodes distributed on the sidewalls and has a structure similar to that of the electrowetting one produced by the company Corning. The interdigital electrodes are formed by winding double flexible wire electrodes wrapped in dielectric ...
Tao Chen +4 more
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Interdigitated electrode modelling for applications in dielectrophoresis
2011 IEEE ICMTS International Conference on Microelectronic Test Structures, 2011Electrical test structures have been designed to enable the characterisation of interdigitated electrode structures in conductive solutions, as used in dielectrophoresis. Test masks have been fabricated to explore the impact of array size, finger separation and solution conductivity on the applied electric field.
C. Chung +5 more
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A low-frequency resonator with interdigital electrodes
International Journal of Electronics, 1984A low-frequency resonator is described. The resonator, operating in a flexural mode, has interdigital electrodes on one surface of a thin piezoelectric ceramic plate. The interdigital electrodes are used as terminal electrodes of a one-port resonator as well as for poling treatment.
KOHJI TODA, KOICHI MIZUTANI
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Fabrication of masks for evaporated interdigital electrodes
Journal of Physics E: Scientific Instruments, 1978A simple method for the fabrication of interdigital evaporation masks is described. The accuracy of the electrode separation is better than 5% at a separation of 0.2 mm. A minimum electrode width of 0.1 mm can be achieved with this method.
B P Blumich, R Germer
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Modelization of interdigitated electrode sensor for impedance spectroscopy measurement
2017 Eleventh International Conference on Sensing Technology (ICST), 2017In this paper, a new design of a sensor for conductivity measurements is presented. Impedance spectroscopy is often used as experimental techniques to detect and measure changes in electrical conductivity using an equivalent circuit model which is adapted to the electrode geometries used.
Ayoub Bourjilat +3 more
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SPIE Proceedings, 2008
To power the tiny sensor devices by MEMS generator which scavenging energy from ambient vibrations is becoming practical due to the power consumption of low power electronics is going down to tens to hundreds μW for integrated wireless sensor devices. In this paper, we are going to present the development on two different types of piezoelectric MEMS
Bor-Shiun Lee, Shun-Chi Lin, Wen-Jong Wu
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To power the tiny sensor devices by MEMS generator which scavenging energy from ambient vibrations is becoming practical due to the power consumption of low power electronics is going down to tens to hundreds μW for integrated wireless sensor devices. In this paper, we are going to present the development on two different types of piezoelectric MEMS
Bor-Shiun Lee, Shun-Chi Lin, Wen-Jong Wu
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Microelectronic Engineering, 2003
The dependence of the capacitance of ferroelectric film-based interdigital capacitors (IDC) on the electrode configuration has been investigated using the Gevorgiann model. The electrode spacing, width, overlapping length, thickness and electrode 'finger' number have different influences on the capacitance.
Wang, Y. +4 more
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The dependence of the capacitance of ferroelectric film-based interdigital capacitors (IDC) on the electrode configuration has been investigated using the Gevorgiann model. The electrode spacing, width, overlapping length, thickness and electrode 'finger' number have different influences on the capacitance.
Wang, Y. +4 more
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Electrode Resistance Effects in Interdigital Transducers
IEEE Transactions on Microwave Theory and Techniques, 1974A distributed RC circuit model is used to describe an interdigital electrode transducer (IDT) having finite conduction in the electrode stripes. The distributed circuit is described by a set of differential equations whose solutions yield the current and voltage distributions along the aperture of the IDT.
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Interdigital Electrode Water Level Sensor
20123, 39, KKU Engineering ...
Titinan Tapaonoi +3 more
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