Results 191 to 200 of about 3,871 (202)

Application of source mask optimization in inverse lithography technology for multiple patterns

Proceedings of SPIE, 2009
Hyo-chan Kim, Sung-gon Jung, Sung-Soo Suh, Young-Chang Kim, Sung-Woo Lee, Suk-Joo Lee, Seong-Woon Choi, Chan-Hoon Park, Joo-Tae Moon   +8 more
openaire   +1 more source

A Design-Oriented Approach to Implement Inverse Lithography Technology OPC in Silicon Photonics MPW Platform

2021
exaly  

A Robust Computational Algorithm for Inverse Photomask Synthesis in Optical Projection Lithography

SIAM Journal on Imaging Sciences, 2012
Edmund Y. Lam, Man Lai Tang, Siu Kai Choy   +2 more
exaly  

Double-dipole mask-synthesis using inverse lithography technology

Microelectronic Engineering, 2010
Min-Chun Tsai
exaly  

Advances in Inverse Lithography

ACS Photonics
Thomas Cecil, Danping Peng, Daniel Abrams   +2 more
exaly  

Unified inverse lithography technology (ILT) and fracturing through recurrent neural network

DTCO and Computational Patterning IV
Shilong Zhang, Youngsoo Shin
openaire   +1 more source

Mask synthesis for 65nm SRAM manufacturing using gradient-based Inverse Lithography Technology (ILT)

2008
Min-Chun Tsai
exaly  

Mastering inverse lithography technology: GPU acceleration, generative AI and reinforcement learning

DTCO and Computational Patterning V
Haoyu Yang, Haoxing Ren
openaire   +1 more source

BBDM-ILT: Brownian bridge diffusion model for inverse lithography technology

Journal of Micro/Nanopatterning, Materials, and Metrology
Haoxiang Jiang, Junqi Yang, Rui Xu, Ming Fang, Dean Liu   +4 more
openaire   +1 more source

MACHINE LEARNING FOR MASK OPTIMIZATION IN INVERSE LITHOGRAPHY TECHNOLOGIES

YANG HAOYU, REN HAOXING
openaire   +1 more source