Results 231 to 240 of about 32,865 (265)
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Enhanced gold film bonding by ion-assisted deposition
Applied Optics, 1984Depot de couches d'or sur des supports en verre polis par evaporation par faisceau d'electrons assistee par faisceau d'ions et examen de l'adherence de ces ...
P J, Martin +2 more
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Deposition and modification of titanium nitride by ion assisted arc deposition
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 1995TiN films were deposited at ambient temperature onto silicon and sapphire substrates using a filtered Ti cathodic arc source and concurrent bombardment from a low energy nitrogen ion beam. The energy and flux of the nitrogen ions were varied and the influence on stress, microhardness, preferred orientation, and surface roughness of the deposited films ...
A. Bendavid +4 more
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Amorphous silicon deposited by xenon ion beam assisted deposition
Journal of Non-Crystalline Solids, 2006Abstract In this work, we present some properties of amorphous silicon deposited by ion beam assisted deposition (IBAD). The films were prepared using a Kauffman ion gun using xenon (Xe) gas to sputter a silicon target. Another ion gun was adopted to simultaneously bombard the film with Xe during the growth of the film with xenon in the 0–300 eV ...
P.F. Barbieri +3 more
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Ion assisted deposition of thin layers
2007Ion beam assisted deposition, the bombardment of thin films with a beam of energetic particles has become a highly developed tool for the preparation of thin films. This technique provides thin films and coatings with modified microstructure and properties. In this paper three examples are presented for the modifying the structure: in-situ modification
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Computer simulation of ion-assisted thin film deposition
Radiation Effects and Defects in Solids, 1997Abstract Ion assistance has been very successful in modern processes of physical or chemical vapour deposition, as it promotes the production of high-quality films and, in particular, the formation of new thin film materials with extreme properties [1–5]. In contrast to a broad range of experimental experience, the basic understanding of the effects of
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Oxide film deposition by Gas-Cluster ion assisted deposition
AIP Conference Proceedings, 1999The development of ultra-high quality (UHQ) films is in progress under the NEDO projects. This project is a collaboration between several companies, national laboratories and universities. A Multi-Beam Gas-Cluster Ion Beam System has been developed for fabricating indium tin oxide (ITO) films.
K. Murai +6 more
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ION-ASSISTED REACTIVE DEPOSITION PROCESSES FOR OPTICAL COATINGS
Surface and Coatings Technology, 1990Abstract Thin films generally have properties which are different from those of the bulk starting material. Regarding optical properties, the observed values of the refractive indices and absorption coefficients are often lower or higher than the optical constants of the same bulk material.
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Ion Beam Assisted Deposition of Ti50Al50N
Annual Technical Conference Proceedings, 2013P. Aliotta, J. Krzanowski
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