Results 221 to 230 of about 44,787 (261)
Some of the next articles are maybe not open access.

Ca and O ion implantation doping of GaN

Applied Physics Letters, 1996
Stephen Pearton, Wilson R G, Stall R A
exaly  

Plasma immersion ion implantation for semiconductor processing

Materials Chemistry and Physics, 1996
N W Cheung
exaly  

METHOD OF ION IMPLANTATION

2001
MATSUNAGA YASUHIKO, FOAD MAJEED ALI
openaire   +2 more sources

Ion implanter and a method of implanting ions

2005
MITCHELL ROBERT   +4 more
openaire   +1 more source

Limits of composition achievable by ion implantation

Journal of Vacuum Science and Technology, 1978
Mayer J W, Liau Z L
exaly  

Recoil implantation and ion‐beam‐induced composition changes in alloys and compounds

Journal of Applied Physics, 1979
Peter Sigmund, Sigmund Peter
exaly  

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