Results 221 to 230 of about 44,787 (261)
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Ca and O ion implantation doping of GaN
Applied Physics Letters, 1996Stephen Pearton, Wilson R G, Stall R A
exaly
Plasma immersion ion implantation for semiconductor processing
Materials Chemistry and Physics, 1996N W Cheung
exaly
Effects of non-amorphizing hydrogen ion implantation on anisotropy in micro cutting of silicon
Journal of Materials Processing Technology, 2015Sandy To
exaly
Accurate determination of pulsed current waveform in plasma immersion ion implantation processes
Journal of Applied Physics, 1999Paul Chu, Tian Xiubo
exaly
Limits of composition achievable by ion implantation
Journal of Vacuum Science and Technology, 1978Mayer J W, Liau Z L
exaly
Plasma source ion‐implantation technique for surface modification of materials
Journal of Applied Physics, 1987exaly
Recoil implantation and ion‐beam‐induced composition changes in alloys and compounds
Journal of Applied Physics, 1979Peter Sigmund, Sigmund Peter
exaly

