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Development of a microwave ion source for ion implantations

Review of Scientific Instruments, 2015
A microwave ion source is expected to have a long lifetime, as it has fewer consumables. Thus, we are in the process of developing a microwave ion source for ion implantation applications. In this paper, we report on a newly developed plasma chamber and the extracted P+ beam currents.
N, Takahashi   +7 more
openaire   +2 more sources

Characteristics of a multidipole ion source

Review of Scientific Instruments, 1978
The properties of a steady-state, dc discharge multidipole ion source have been investigated. The plasma density in the source depends on the magnet geometries, the discharge voltage, and the bias voltage on the first extraction grid. Different schemes to reduce the loss of ions to the chamber wall are described.
K N, Leung   +6 more
openaire   +2 more sources

Performance of an inverted ion source

Review of Scientific Instruments, 2013
Whereas energetic ion beams are conventionally produced by extracting ions (say, positive ions) from a plasma that is held at high (positive) potential, with ion energy determined by the potential drop through which the ions fall in the beam formation electrode system, in the device described here the plasma and its electronics are held at ground ...
M C, Salvadori   +6 more
openaire   +2 more sources

Atmospheric pressure ion sources

Mass Spectrometry Reviews, 2009
AbstractThis review of atmospheric pressure ion sources discusses major developments that have occurred since 1991. Advances in the instrumentation and understanding of the key physical principles are the primary focus. Developments with electrospray and atmospheric pressure chemical ionization and variations encompassing adaptations for surface ...
Thomas R, Covey   +2 more
openaire   +2 more sources

Reversal ion source: A new source of negative ion beams

Review of Scientific Instruments, 1985
We demonstrate a new type of ion source for producing either pulsed or continuous negative ion beams. The source, dubbed the ‘‘reversal ion source,’’ utilizes an electrostatic ‘‘mirror’’ which reverses trajectories in an electron beam, producing electrons at their turning point having a distribution of velocities centered at zero velocity.
O. J. Orient   +2 more
openaire   +1 more source

Ion source development at KVI

Review of Scientific Instruments, 2008
Ion source development at KVI is focused on increasing the beam intensity from the electron cyclotron resonance ion source injector and optimizing the beam transport and injection into the superconducting AGOR cyclotron. We describe several modifications that have resulted in a significant performance increase of the ion source.
Beijers, J. P. M.   +5 more
openaire   +3 more sources

An ion source research facility

Review of Scientific Instruments, 2008
As an ion source developer, D-Pace frequently faces the issue of needing access to a research facility to be able to test equipment or to develop our existing technology further. The closest facility to perform such tasks is hundreds of kilometers away, at TRIUMF, and it is not always feasible to make use of it on a timely basis.
M, Roeder   +4 more
openaire   +2 more sources

A hollow cathode ion source for production of primary ions for the BNL electron beam ion source

Review of Scientific Instruments, 2014
A hollow cathode ion source, based on one developed at Saclay, has been modified significantly and used for several years to produce all primary 1+ ions injected into the Relativistic Heavy Ion Collider Electron Beam Ion Source (EBIS) at Brookhaven. Currents of tens to hundreds of microamperes have been produced for 1+ ions of He, C, O, Ne, Si, Ar, Ti,
James, Alessi   +5 more
openaire   +2 more sources

Pantechnik new superconducting ion source: PantechniK Indian Superconducting Ion Source

Review of Scientific Instruments, 2012
The new ECR ion source PantechniK Indian Superconducting Ion Source (PKISIS) was recently commissioned at Pantechnik. Three superconducting coils generate the axial magnetic field configuration, while the radial magnetic field is done with the multi-layer permanent magnets.
G, Gaubert   +9 more
openaire   +2 more sources

A High Current Ion Source

Review of Scientific Instruments, 1949
An ion source is described which utilizes a hot cathode as an electron source and an axial magnetic field for focusing. The electron beam is pulsed for 250 μsec. 60 times a second. Peak ion currents of 100 ma are readily obtainable. At a hydrogen pressure of 25 microns of Hg the proton content of the beam is between 30 and 40 percent.
openaire   +2 more sources

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