Results 271 to 280 of about 615,196 (306)
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Ion sources for mass spectrometry II. Filaments for low temperature ion sources
International Journal of Mass Spectrometry and Ion Physics, 1983Abstract Two low power filaments (thin wire rhenium and LaB 6 ) have been designed to allow a chemical ionization ion source to operate below 100°C. Both filaments simplified analysis of the thermally sensitive compound flurazepam using negative chemical ionization mass spectrometry.
L. Kelner +4 more
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Gas discharge ion source III. Modified Berkeley multifilament ion source
Review of Scientific Instruments, 1978Total ion current, ion energy, mass and current density distributions, and the impurity content of the ion beams produced by a modified Berkeley multifilament ion source (MFIS) were measured as a function of source configuration, gas pressure, and operating conditions: the ’’best’’ configuration produced beams of 200 mA or more at pressures between 0 ...
R W, Bickes, F M, Bacon, J B, O'Hagan
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Ion sources for use in ion implantation
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1989Abstract This paper reviews high current ion sources suitable for commercial use. Although the production of high currents of a variety of ions is a vital consideration, this paper focuses on other aspects of ion source performance. The modern ion implanter is a major item of expensive capital equipment, with the ion source being its least reliable ...
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Microwave ion source for ion implantation
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1987Abstract Fundamentals of microwave ion sources used for ion implantation as well as their main features are reviewed and evaluated. Ion sources using plasmas generated by microwave discharge in a magnetic field have many advantageous features. Since they operate even with reactive source materials, they can provide long-life stable ion beams for a ...
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Ion Source Electronics and Microwave Generators for Ion Sources
2017H. Horneff, F. Bourg
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A new off-line ion source facility at IGISOL
Nuclear Instruments & Methods in Physics Research B, 2020M Vilen, L Canete, B Cheal
exaly
New high current low energy ion source
Journal of Vacuum Science & Technology an Official Journal of the American Vacuum Society B, Microelectronics Processing and Phenomena, 1987Aoyagi Y, Namba S
exaly

