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Loading Effect during SiGe/Si Stack Selective Isotropic Etching for Gate-All-Around Transistors
ACS Applied Electronic MaterialsLado Filipovic, Yayi Wei, Hua Shao
exaly
Isotropic etching of silicon using hydrogen chloride
2000BARLOCCHI GABRIELE, VILLA FLAVIO
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Microneedle with isotropically etched tip, and method of fabricating such a device
1999PISANO ALBERT P, LEBOUITZ KYLE S
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Method for manufacturing semiconductor structures by anisotropic and isotropic etching
1980openaire +1 more source

