Results 281 to 286 of about 243,893 (286)
Some of the next articles are maybe not open access.

Undercut control in isotropic wet etch processes

2019
LIU CHI-CHUN   +7 more
openaire   +1 more source

Loading Effect during SiGe/Si Stack Selective Isotropic Etching for Gate-All-Around Transistors

ACS Applied Electronic Materials
Lado Filipovic, Yayi Wei, Hua Shao
exaly  

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