Results 271 to 280 of about 243,893 (286)

Isotropic Atomic Layer Etching of ZnO Using Acetylacetone and O2 Plasma

ACS Applied Materials & Interfaces, 2018
Adriaan Mackus, Alfredo Mameli, Wilhelmus M. M. Kessels   +2 more
exaly  

Isotropically etched channels for gas chromatography

Analytical methods and instrumentation, 1996
Tjerkstra, R.W., Gardeniers, J.G.E., van den Berg, A., Elwenspoek, M.C.   +3 more
openaire   +1 more source

Isotropic Etching of Silicon and Related Materials

2017
openaire   +1 more source

Nanostructured multi-crystalline silicon solar cell with isotropic etching by HF/KMnO4

Physica Status Solidi A, 2017
Ye Jiang, Wangyang Yang, Honglie Shen
exaly  

Airbridged-gate MESFETs fabricated by isotropic reactive ion etching

IEEE Transactions on Electron Devices, 1993
R C Compton
exaly  

Relationship Between Wafer-Level Warpage and Cu Overburden Thickness Controlled by Isotropic Wet Etching for Through Si Vias

IEEE Transactions on Components, Packaging and Manufacturing Technology, 2013
Hong Yu Li
exaly  

ISOTROPIC ATOMIC LAYER ETCH FOR SILICON AND GERMANIUM OXIDES

2016
LILL THORSTEN, BERRY III IVAN L, SHEN MEIHUA, SCHOEPP ALAN M, HEMKER DAVID J   +4 more
openaire   +2 more sources

METHOD AND APPARATUS FOR SEQUENTIALLY ETCHING A WAFER USING ANISOTROPIC AND ISOTROPIC ETCHING

2001
SCHMIDT URSULA, SCHOENLEBER WALTER, SCHMIDT MICHAEL   +2 more
openaire   +1 more source

ISOTROPIC AND ANISOTROPIC RESIST DRY ETCHING: A CASE STUDY.

1996
openaire   +1 more source

Isotropic wet chemical etching of deep channels with optical surface quality in silicon with HNA based etching solutions

Materials Science in Semiconductor Processing, 2013
exaly