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Discharge physics of high power impulse magnetron sputtering
Surface and Coatings Technology, 2011André Anders
exaly
Discharge in dual magnetron sputtering system
IEEE Transactions on Plasma Science, 2005J Musil, P Baroch
exaly
Transparent ZnO thin-film transistor fabricated by rf magnetron sputtering
Applied Physics Letters, 2003P F Çarcia, Çarcia P F
exaly
Radio frequency magnetron sputtering of Li7La3Zr2O12 thin films for solid-state batteries
, 2016S. Lobe +7 more
semanticscholar +1 more source

