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Magnetron sputtering apparatus

Metal Finishing, 2001
openaire   +1 more source

Discharge physics of high power impulse magnetron sputtering

Surface and Coatings Technology, 2011
André Anders
exaly  

Discharge in dual magnetron sputtering system

IEEE Transactions on Plasma Science, 2005
J Musil, P Baroch
exaly  

Magnetron sputtering apparatus

Metal Finishing, 1995
openaire   +1 more source

Transparent ZnO thin-film transistor fabricated by rf magnetron sputtering

Applied Physics Letters, 2003
P F Çarcia, Çarcia P F
exaly  

Magnetron sputtering systems

Microelectronics Reliability, 1983
openaire   +1 more source

Innovative Zr-Cu-Ag thin film metallic glass deposed by magnetron PVD sputtering for antibacterial applications

, 2017
A. Etiemble   +7 more
semanticscholar   +1 more source

Magnetron sputtering apparatus

Metal Finishing, 1998
openaire   +1 more source

Radio frequency magnetron sputtering of Li7La3Zr2O12 thin films for solid-state batteries

, 2016
S. Lobe   +7 more
semanticscholar   +1 more source

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